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Tuning fork type quartz crystal resonant frequency-based vacuum degree detection system

A quartz crystal and resonant frequency technology, applied in the field of monitoring systems, can solve the problems of small space usage and large volume, etc., achieve fast response time and reduce design difficulty

Inactive Publication Date: 2021-07-09
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, with the development of miniaturization and intelligence of products, these traditional vacuum measurement devices cannot be used in small spaces due to their large volume

Method used

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  • Tuning fork type quartz crystal resonant frequency-based vacuum degree detection system
  • Tuning fork type quartz crystal resonant frequency-based vacuum degree detection system
  • Tuning fork type quartz crystal resonant frequency-based vacuum degree detection system

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Embodiment Construction

[0030] Next, the technical solutions in the embodiments of the present invention will be apparent from the embodiment of the present invention, and it is clearly described, and it is understood that the described embodiments are merely embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, there are all other embodiments obtained without making creative labor without making creative labor premises.

[0031] In the prior art, the vacuum measurement device is large, and the problem cannot be used in small spaces, the present application discloses a vacuum degree detection system based on tuning quartz crystal resonant frequency, see figure 1 The system can include:

[0032] Quartz crystal 01, the quartz crystal is placed in a true cavity to be tested. The resonant frequency of the quartz crystal has a different degree of response with different degrees of response. The vacuum of the quartz crystal can be detected by the r...

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Abstract

The invention provides a tuning fork type quartz crystal resonant frequency-based vacuum degree detection system which comprises a quartz crystal arranged in a vacuum cavity to be detected; a resonance circuit which is connected with the quartz crystal and is used for controlling the quartz crystal to resonate; a resonance signal generator which is connected with the quartz crystal and is used for controlling the resonance circuit to generate resonance; and a resonance detector which is used for detecting the resonance frequency of the quartz crystal based on the resonance circuit. Due to the fact that the components of the quartz crystal in the measuring device are small in size, the quartz crystal can be flexibly placed in a small space, and measurement of the vacuum degree in the small space is achieved.

Description

Technical field [0001] The present invention relates to the technical field of monitoring system, and more particularly to a vacuum degree detection system based on a tuning quartz crystal resonant frequency. Background technique [0002] The measurement of vacuum is an industrial R & D, production, testing, etc., must be indispensable, and the accuracy of vacuum measurement is a crucial role in certain critical production process links and some products. The earliest vacuum measuring device typically performs measurement based on macro material itself with the same size (for example, U-tube pressure gauge, elastic element pressure gauge), with the advancement of electronic technology and sensing technology, then there has been Some parameters with functional relationships with gas vacuum are measured, and calibrates to calculate the measurement of real vacuum, such as thermal conductivity vacuumme, hot cathode ionization vacuum meter, cold cathode ionization vacuum meter, capaci...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L21/00
CPCG01L21/00
Inventor 夏雨健陈双明刘啸嵩宋礼
Owner UNIV OF SCI & TECH OF CHINA