Material tissue quantitative analysis system using scanning electron microscope and energy disperse spectroscopy

Abstract

The invention belongs to the technical field of material analysis, and discloses a material tissue quantitative analysis system using a scanning electron microscope and an energy disperse spectroscopy. The system comprises a material preprocessing module, an energy spectrum image acquisition module, a quantitative measurement module, an image processing module, a central control module, a region delimiting module, a brightness threshold selection module, a delimited region determination module, a determination result analysis module and a display and storage module. According to the material tissue quantitative analysis system using the scanning electron microscope and the energy disperse spectroscopy provided by the invention, material pretreatment is carried out to realize acquisition of a material sample, interference in determination is reduced, and a determination result is more accurate; the scanning electron microscope is high in resolution, tissue details can be displayed on the submicron scale, the contrast is obvious, and the measurement precision is high; and by utilizing the component contrast difference of a back scattering image of the scanning electron microscope, phases of different components can be directly and quantitatively analyzed, so that the system is wide in applicability, suitable for various metal materials, steel products, minerals and refractory materials, and rapid and convenient to measure and operate.

Description

technical field [0001] The invention belongs to the technical field of material analysis, in particular to a material tissue quantitative analysis system using a scanning electron microscope and an energy spectrometer. Background technique [0002] At present: materials are generally composed of one or more phases, and the proportion of each constituent phase has always been a basic concern in the material field. There are many methods for microscopic quantitative analysis of the constituent phases in materials, such as quantitative metallographic analysis, X-ray backscattering diffraction analysis (EBSD), X-ray diffraction analysis (XRD) and so on. The metallographic quantitative analysis method is a relatively intuitive and commonly used one. The principle is to make certain geometric measurements on the microstructure with different contrasts on a two-dimensional plane (sample polishing plane or analysis surface), and then calculate the apparent contrast in the three-dime...

AI Technical Summary

Problems solved by technology

The disadvantage is that there are high requirements for the analyst, the ability of micro-area analysis is poor, and the results of XRD are not intuitive enough compared with the results of metallographic quantitative analysis

[0005] The existing quantitative analysis methods of materials have their own applicability, but there are problems of insufficient resolution, difficult sample preparation or complicated testing process

[0006] Through the above analysis, the problems and defects of the existing technology are: the existing quantitative analysis methods of materials have their own applicability, but there are problems of insufficient resolution, difficult sample preparation or complicated testing process

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