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Low-temperature pump convenient for water vapor regeneration

A cryogenic pump, water vapor technology, applied in the direction of pumps, liquid variable capacity machinery, machines/engines, etc., can solve the problem of water liquefaction and cannot be discharged, and achieve the best regeneration effect.

Pending Publication Date: 2021-08-10
ZHEJIANG BWOKAI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The present invention aims at the shortcomings of the prior art that a large amount of water liquefies and cannot be discharged in the transition cylinder in the regeneration process, and provides a cryopump that facilitates water vapor regeneration

Method used

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  • Low-temperature pump convenient for water vapor regeneration
  • Low-temperature pump convenient for water vapor regeneration
  • Low-temperature pump convenient for water vapor regeneration

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] A low-temperature pump that facilitates water vapor regeneration, including a cold pump housing 1, a primary cold head 2, a secondary cold head 3 and a refrigerator 4, the primary cold head 2 is installed in the cold pump housing 1, and the secondary cold head 3 Installed in the first-stage cold head 2, a transition cylinder 5 connected to the inside of the cold pump shell 1 is installed outside, and cryopumps with a diameter of DN400 and above usually adopt the form of transition cylinder 5 to install the refrigerator 4. The refrigerator 4 is installed on the transition cylinder 5, and the cold head of the refrigerator 4 extends into the cold pump housing 1 through the transition cylinder 5 and is connected with the primary cold head 2 and the secondary cold head 3 at the same time. During the regeneration process, a large amount of water molecules flow into the transition cylinder after liquefaction and accumulate and cannot be discharged, and the contact surface betwe...

Embodiment 2

[0058] Embodiment 2 has basically the same features as Embodiment 1, except that the height h of the pre-extraction cavity 10 is 200mm, and the caliber of the pre-extraction joint 12 is above KF80.

Embodiment 3

[0060] Embodiment 3 has basically the same features as Embodiment 1, except that the height h of the pre-extraction chamber 10 is 250 mm, and the caliber of the pre-extraction joint 12 is above KF80.

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Abstract

The invention relates to the technical field of vacuum, and discloses a low-temperature pump convenient for water vapor regeneration. The low-temperature pump comprises a cold pump shell, a first-stage cold head, a second-stage cold head and a refrigerating machine, the first-stage cold head is installed in the cold pump shell, the second-stage cold head is installed in the first-stage cold head, a transition cylinder communicating with the interior of the cold pump shell is installed outside the cold pump shell, and the refrigerating machine is installed on the transition cylinder. A cold head of the refrigerating machine extends into the cold pump shell through the transition cylinder and is connected with the first-stage cold head and the second-stage cold head at the same time. A heating piece for heating an inner cavity of the transition cylinder is mounted on the transition cylinder. A pre-pumping cavity is formed between the top end of the first-stage cold head and a pump opening of the cold pump shell, and a pre-pumping connector communicating with the pre-pumping cavity is installed on the side wall of the pre-pumping cavity. A cooling pump shell of the low-temperature pump is heightened. A large-caliber pre-pumping connector can be installed at a pump opening of the low-temperature pump, meanwhile, a high-pumping-speed pre-pumping pump is used for pre-pumping, and in combination with built-in heating, water vapor adsorbed by the low-temperature pump is pumped away by the pre-pumping pump in a vapor state, so that the water vapor regeneration effect of the low-temperature pump is optimal.

Description

technical field [0001] The invention relates to the field of vacuum technology, in particular to a low-temperature pump that facilitates water vapor regeneration. Background technique [0002] With the development of the vacuum system, especially the development of the vacuum coating process, the types of vacuum coating substrates and coating materials are becoming more and more diverse. [0003] The diversification of substrates, coating materials and processes has brought many technical problems, including the generation of a large number of water molecules during the coating process. [0004] In production, these water molecules will affect the quality stability of the process and products, and need to be processed by baking and vacuum pumping. [0005] In vacuum applications, especially in the field of vacuum coating, the water vapor in the vacuum space is less effective by ordinary extraction methods, such as a cryopump with application number 201810611820.2. Includin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/08
CPCF04B37/08F04B37/085
Inventor 陈家富
Owner ZHEJIANG BWOKAI TECH
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