Angle detection device for cutting surface of silicon single crystal rod

A technology of angle detection and monocrystalline silicon rods, which is applied in the direction of fine working devices, stone processing equipment, manufacturing tools, etc., can solve the problems of lack of automatic correction devices for detection devices, inability to automatically clamp and affect production efficiency, etc., to achieve Simple and reasonable structure, convenient measurement and convenient operation

Pending Publication Date: 2021-08-17
晶海洋半导体材料(东海)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, most of the existing single crystal silicon rod cutting surface angle detection devices have the following shortcomings: 1. Can not be automatically clamped, manual clamping is required, which greatly increases labor intensity and affects production efficiency; 2. The detection device lacks The automatic calibration device needs to be manually checked and corrected after being used for a period of time; therefore, we have improved this and proposed a single crystal silicon rod cutting surface angle detection device

Method used

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  • Angle detection device for cutting surface of silicon single crystal rod
  • Angle detection device for cutting surface of silicon single crystal rod
  • Angle detection device for cutting surface of silicon single crystal rod

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Embodiment

[0020] Example: such as Figure 1-4 As shown, a single crystal silicon rod cutting surface angle detection device of the present invention includes a frame 1, a linear guide rail 2 is fixedly installed on one side of the top of the frame 1, a lead screw 9 is fixedly installed inside the linear guide rail 2, and there are 9 sets of lead screws A slider 10 is provided, the top of the slider 10 is fixedly mounted with a moving fixture 4, the top of the frame 1 is fixedly mounted with a fixed fixture 5 on a side away from the moving fixture 4, and the top of the frame 1 is fixed on a side close to the fixed fixture 5 An angle measuring instrument 6 is installed, a motor 8 is fixedly installed on one side of the frame 1, and a rotating shaft 3 is fixedly installed on a side close to the top of the motor 8 inside the frame 1. The output shaft sleeve of the motor 8 is provided with a driving gear 23, and the rotating shaft 3 A transmission gear 22 is sheathed, and a driven gear 11 is...

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Abstract

The invention discloses an angle detection device for a cutting surface of a silicon single crystal rod. The angle detection device comprises a rack, wherein a linear guide is fixedly installed at one side of the top of the rack; a lead screw is fixedly installed in the linear guide; the lead screw is sleeved with a sliding block; a movable clamp is fixedly installed at the top of the sliding block; a fixed clamp is fixedly installed at the side, away from the movable clamp, of the top of the rack; an angle measuring instrument is fixedly installed at the side, close to the fixed clamp, of the top of the rack; a motor is fixedly installed at one side in the rack; a rotating shaft is fixedly installed at the side, close to the top of the motor, in the rack; an output shaft of the motor is sleeved with a driving gear; the rotating shaft is sleeved with a transmission gear; and the side, away from the sliding block, of the lead screw is sleeved with a driven gear. The angle detection device for the cutting surface of the silicon single crystal rod is simple and reasonable in structure and convenient to operate, effectively solves the problem that most existing angle measurement devices are lack of automatic clamping devices and automatic correction devices, and has wide popularization and application values.

Description

technical field [0001] The invention relates to the technical field of angle detection, in particular to a device for detecting the angle of a cut surface of a single crystal silicon rod. Background technique [0002] Single crystal silicon rods are silicon single crystal rods formed by shaping or pulling in a furnace through zone melting or Czochralski technology. This kind of single crystal silicon rod needs to be cut. During the cutting process, a certain angle will inevitably be formed on the cutting surface. When the angle exceeds the allowable range, the cutting machine needs to be adjusted. Crystal silicon rods are needed in this process. Cutting surface angle detection device. However, most of the existing single crystal silicon rod cutting surface angle detection devices have the following shortcomings: 1. Can not be automatically clamped, manual clamping is required, which greatly increases labor intensity and affects production efficiency; 2. The detection device...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/00
CPCB28D5/0058B28D5/0088
Inventor 樊欢欢王海洋高稳
Owner 晶海洋半导体材料(东海)有限公司
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