Film quality detection method and device, electronic equipment and storage medium

Abstract

The invention provides a film quality detection method and device, electronic equipment and a storage medium, and relates to the field of film quality control. The film quality detection method comprises the following steps: according to a physical mathematical model of a film sample and an ellipsometry detection curve obtained by ellipsometry detection of the film sample, taking an intrinsic refractive index dispersion expression of a film material as a characteristic parameter, and performing inversion to generate an ellipsometry simulation curve of the film sample; calculating the fitting degree of the ellipsometry detection curve and the ellipsometry simulation curve; and when the fitting degree is close to or greater than a preset fitting degree threshold value, determining that the quality of the film sample reaches a preset standard. The problems that in the prior art, film quality detection precision is low, detection procedures are complex, and evaluation standards lack quantitative indexes can be solved.

Description

technical field [0001] The present application relates to the field of film quality control, in particular, to a film quality detection method, device, electronic equipment and storage medium. Background technique [0002] The quality of optical films depends on the deposition quality of high and low refractive index material films. The performance and quality of high and low refractive index material films are closely related to the deposition process parameters of the film, and are also closely related to the deposition and growth mode of the film. [0003] Thin film deposition growth methods are mainly divided into atomic layer deposition technology, chemical vapor deposition technology and physical vapor deposition technology, etc. Different thin film deposition methods have different corresponding process parameters. Thin film physical vapor deposition technology is widely used in the fields of materials, optoelectronics, semiconductors, biomedical research and applicat...

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Problems solved by technology

[0005] In view of this, the purpose of the embodiment of the present application is to provide a film quality detection method, device, electronic equipment and storage medium to improve the low accuracy of film quality detection, complex detection process and lack of quantification of evaluation criteria existing in the prior art. index problem

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