High-purity xenon purity analysis device and method

Abstract

The invention discloses a high-purity xenon purity analysis device and method. The analysis device comprises a pneumatic ten-way valve, a first pneumatic six-way valve, a second pneumatic six-way valve, a helium ionization detector and a stainless steel gas path pipe, a carrier gas main pipe is divided into a first carrier gas branch pipe, a second carrier gas branch pipe and a third carrier gas branch pipe. The pneumatic ten-way valve is provided with ports 1-10, and the first pneumatic six-way valve and the second pneumatic six-way valve are both provided with ports 1-6; the first carrier gas branch pipe is connected with a first port of a pneumatic ten-way valve through a five-way connector, the second carrier gas branch pipe is connected with a sixth port of the pneumatic ten-way valve through a five-way connector, the third carrier gas branch pipe is connected with a fourth port of a first pneumatic six-way valve through a five-way connector, and a first quantitative ring is connected between a second port and a ninth port of the pneumatic ten-way valve. A second quantitative ring is connected between the fifth port and the eighth port of the pneumatic ten-way valve; the analysis method has great breakthroughs in analysis period, data validity, chromatographic instrument stability and production cost.

Description

technical field [0001] The invention relates to a gas analysis device and an analysis method thereof, in particular to a high-purity xenon purity analysis device and an analysis method thereof, belonging to the field of gas detection and analysis. Background technique [0002] Xenon (Xe) is an important rare resource widely used in semiconductor, aerospace, laser, medical equipment and other fields. At present, the main source of xenon is to capture from the air, and its concentration in the air is 0.087ppm. A relatively mature method in industry is to obtain high-purity xenon and krypton (Kr) from air by low-temperature distillation, and then separate and remove krypton from xenon by distillation and adsorption, and finally obtain high-purity xenon. [0003] In the field of aerospace, Xe is an important electric propellant. The purity of Xe directly affects the life of the cathode material, especially the oxygen content and water content in xenon must be strictly controlle...

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Problems solved by technology

[0004] Xenon gas is very expensive and is called gold gas. In the prior art, no equipment can completely detect H in xenon gas. 2 , O 2 , Ar, N 2 、CH 4 , CO, CO 2 and C 2 f 6 , so many impurities, in view of this, it is an urgent problem for those skilled in the art to develop a high-purity xenon gas purity analysis device and its analysis method that can complete the full component detection of impurities in xenon gas in one injection.

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