Scale
A ruler and pattern technology, applied in the direction of converting sensor output, instruments, measuring devices, etc., can solve the problems of reduced measurement accuracy, diffuse reflection of fluororesin, and inability to prevent corrosion, and achieve high measurement accuracy and corrosion inhibition effects
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no. 1 approach
[0046] figure 2 It is a cross-sectional view of the scale 100 of the first embodiment. The scale 100 is a light reflection type scale. Such as figure 2 As shown in the example of , a multilayer reflective film is laminated on one main surface of the substrate 10 . For example, the first reflective film 30 is laminated on one main surface of the substrate 10 , and the second reflective film 40 is laminated on the first reflective film 30 . A scale pattern 20 in which a plurality of grids are arranged at predetermined intervals is provided on the second reflective film 40 . The protective film 50 is provided to cover the exposed portion of the second reflective film 40 and the scale pattern 20 . Furthermore, a fluorine film 60 is provided to cover the protective film 50 .
[0047] and figure 1 Similar to the scale 200 of the substrate 10, a plurality of gratings are arranged at predetermined intervals on one main surface of the substrate 10. The scale pattern 20 constit...
no. 2 approach
[0057] Figure 4 It is a sectional view of the scale 100a of the second embodiment. The scale 100a is a light reflection type scale. Such as Figure 4 As shown in the example, scale 100a with figure 2 The difference of the scale 100 is that the protective film 50 is not provided. For example, the protective film 50 does not have to be provided in an environment that is not exposed to corrosive liquids, corrosive gases, and the like.
no. 3 approach
[0059] Figure 5 It is a sectional view of the scale 100b of the third embodiment. The scale 100b is a light reflection type scale. Such as Figure 5 As shown in the example, scale 100b with figure 2 The scale 100 differs in that the third reflective film 70 is provided between the second reflective film 40 and the scale pattern 20 and the protective film 50 . The third reflective film 70 is made of copper, silver, nickel, vanadium, iron, cobalt, titanium, tin and other metals.
[0060] For example, the protective film 50 can be formed by performing oxidation treatment, nitriding treatment, or the like on the surface of the reflection film formed on the third reflection film 70 . The remaining reflective film that has not been oxidized or nitrided functions as the third reflective film 70 .
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Abstract
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