Calibration method for robots

A technology of mechanical arm and calibration method, which is applied in the direction of manipulator, program control manipulator, manufacturing tools, etc., to reduce additional loss, improve accuracy, and reduce downtime

Active Publication Date: 2021-08-27
CHANGXIN MEMORY TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Based on this, it is necessary to provide a calibration method for the mechanical arm in view of the defects of manual operation using external handles and calibration jigs in the traditional calibration method of the mechanical arm

Method used

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  • Calibration method for robots
  • Calibration method for robots
  • Calibration method for robots

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Embodiment Construction

[0113] In order to understand the present application, the present application will be further described with reference to the related drawings. The preferred embodiment of the present application is given. However, the present application can be implemented in many different forms, is not limited to the embodiments described herein. Conversely, the purpose of providing these embodiments is to make the disclosure of the present application more thoroughly.

[0114] All techniques and scientific terms used herein are commonly understood by those skilled in the art, unless otherwise defined. The terms used herein in the specification of the present application are merely intended to describe the embodiments of the specific embodiments, are not intended to limit the present application.

[0115] It should be understood that when the element or layer is referred to as "on ...", "under ..." or "connect to" other elements or layers, it can be directly on other elements or layers or belo...

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Abstract

The invention relates to a calibration method for robots. The calibration method comprises the following steps of providing a calibration device which comprises jig wafers; grabbing and/or transmitting the jig wafers by using the robots to obtain acquisition data; judging whether the robots need to be calibrated or not based on the acquisition data; and obtaining a compensation value according to the acquisition data when the robots need to be calibrated, and calibrating the robots based on the compensation value. According to the calibration method for the robots, an external handle and a calibration jig do not need to be manually used for operation, the misoperation risk caused by manual calibration can be avoided, extra losses caused by misoperation are reduced, and therefore the accuracy of the calibration process of the robots is improved; and meanwhile, according to the calibration method for robots, calibration can be completed without opening a cavity, reset work does not need to be conducted after calibration is completed, the downtime of a machine table can be effectively shortened, and the working efficiency of the machine table is improved.

Description

Technical field [0001] The present application relates to the technical field of semiconductor equipment, and more particularly to a correction method of a robot arm. Background technique [0002] In the semiconductor technology, the wafer needs to be transmitted in different chambers to achieve different processing processes on wafers such as etching processes and deposition processes. Among them, a robust arm (Robot) is generally transmitted, and the common robust arm includes a vacuum transport module robot arm (Air Transmission Module Robot, ATM Robot). [0003] Before using the robotic arm to transfer the wafers, it is often necessary to correct the transmission accuracy of the robot arm to avoid damage to the wafer during the transfer. [0004] The calibration method of conventional robotic arms is generally calibrated to move the robot arm to each chamber or air lock in the robotic arm correction process operator. Since the placement of the fixation and the use of the hand...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J9/16B25J9/10
CPCB25J9/16B25J9/1692B25J9/10
Inventor 杨军任春虎田乐王刘光
Owner CHANGXIN MEMORY TECH INC
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