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Double-sided capacitive humidity sensor and preparation method thereof

A humidity sensor, capacitive technology, applied in the sensor field, can solve the problems of humidity measurement error, low humidity sensing efficiency, limited space, etc., and achieve the effect of tolerance value adjustment range, high humidity sensitivity, and wide detection space range.

Pending Publication Date: 2021-08-27
北京航天微电科技有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0003] However, when this type of polymer capacitive humidity sensor is applied to components, the ambient humidity to be measured can only be sensed from the upper surface of the chip, and the space is limited, resulting in humidity measurement errors and low humidity sensing efficiency.

Method used

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  • Double-sided capacitive humidity sensor and preparation method thereof
  • Double-sided capacitive humidity sensor and preparation method thereof
  • Double-sided capacitive humidity sensor and preparation method thereof

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Effect test

Embodiment 1

[0047] Such as figure 1 As shown, this embodiment provides a double-sided capacitive humidity sensor, including a substrate 1 , a first electrode layer 2 , a first moisture-sensing layer 3 , a second electrode layer 4 and a second moisture-sensing layer 6 .

[0048] The first electrode layer 2 and the second electrode layer 4 are respectively connected to the two sides of the substrate 1 and pasted on the two sides of the substrate 1. The first moisture-sensitive layer 3 is covered on the first electrode layer 2, and the second moisture-sensitive layer 6 covering the second electrode layer 4.

[0049] Wherein, the first electrode layer 2 and the second electrode layer 4 are interdigital electrode layers. Wherein, the areas of the first electrode layer 2 and the second electrode layer 4 and the areas of the first moisture-sensing layer 3 and the second moisture-sensing layer 6 may be the same or different, and may be specifically designed according to actual conditions. There...

Embodiment 2

[0059] Such as figure 2 As shown, this embodiment provides a double-sided capacitive humidity sensor, including a substrate 1, a first electrode layer 2, a first moisture-sensing layer 3, a second electrode layer 4, a second moisture-sensing layer 6 and a third electrode Layer 5.

[0060] The first electrode layer 2 and the second electrode layer 4 are respectively connected to the two sides of the substrate 1 and pasted on the two sides of the substrate 1. The first moisture-sensitive layer 3 is covered on the first electrode layer 2, and the second moisture-sensitive layer 6 covering the second electrode layer 4. The third electrode layer 5 covers the first moisture-sensing layer 3 .

[0061] Wherein, the first electrode layer 2 and the second electrode layer 4 are double electrode layers. Wherein, the areas of the first electrode layer 2 and the second electrode layer 4 and the areas of the first moisture-sensing layer 3 and the second moisture-sensing layer 6 may be th...

Embodiment 3

[0073] Such as figure 2 As shown, this embodiment provides a double-sided capacitive humidity sensor, including a substrate 1, a first electrode layer 2, a first moisture-sensing layer 3, a second electrode layer 4, a second moisture-sensing layer 6 and a third electrode Layer 5.

[0074] The first electrode layer 2 and the second electrode layer 4 are respectively connected to both sides of the substrate 1 , the first moisture-sensing layer 3 covers the first electrode layer 2 , and the second moisture-sensing layer 6 covers the second electrode layer 4 . The third electrode layer 5 covers the first moisture-sensing layer 3 .

[0075] Wherein, the first electrode layer 2 is a double electrode layer, and the second electrode layer 4 is an interdigital electrode layer. Wherein, the areas of the first electrode layer 2 and the second electrode layer 4 and the areas of the first moisture-sensing layer 3 and the second moisture-sensing layer 6 may be the same or different, and ...

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Abstract

The invention relates to a double-sided capacitive humidity sensor and a preparation method thereof, and belongs to the technical field of sensors. The double-sided capacitive humidity sensor comprises a substrate, a first electrode layer, a first humidity sensing layer, a second electrode layer and a second humidity sensing layer; the first electrode layer and the second electrode layer are connected with the two faces of the substrate respectively, the first electrode layer is covered with the first humidity sensing layer, and the second electrode layer is covered with the second humidity sensing layer. The invention further provides a preparation method of the double-sided capacitive humidity sensor. The double-sided capacitive humidity sensor can perform double-sided humidity detection, can perform humidity detection on a to-be-detected environment more comprehensively, and improves humidity sensing efficiency.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a double-sided capacitive humidity sensor and a preparation method thereof. Background technique [0002] Atmospheric humidity measurement is an important requirement in most areas of meteorological activity such as weather analysis and forecasting, agriculture, aviation services and environmental research for many specific applications. At present, humidity measurement usually places the humidity sensor in a bare environment, in direct contact with the air. At present, the polymer capacitive humidity sensor is commonly used, and a humidity-sensitive capacitive structure is formed by preparing metal electrodes and humidity-sensitive materials on the upper surface of the substrate as the humidity-sensing medium layer. [0003] However, when this type of polymer capacitive humidity sensor is applied to components, the humidity of the environment to be measured can only...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22
CPCG01N27/223G01N27/226G01N27/228
Inventor 张倩魏家贵林树超徐浩倪烨于海洋袁燕段英丽胡杨端瑞王君张同
Owner 北京航天微电科技有限公司
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