Portable ultrahigh vacuum low-temperature observation cavity with microcell characterization function and operation method

Abstract

The invention discloses a portable ultrahigh vacuum low-temperature observation cavity with a microcell characterization function and an operation method. The portable ultrahigh vacuum low-temperature observation cavity comprises an ultrahigh vacuum main cavity with a multi-opening tubular structure, and the cavity is communicated with a sample transfer rod, an aspirator pump, a hand valve, a corrugated pipe and a glass observation window; a cold cavity extending into the ultrahigh vacuum main cavity is formed in the corrugated pipe, and a sample storage groove for placing a UHV sample supporting handle is formed in the end part of the outer layer of the cold cavity; and the sample transfer rod extends into the ultrahigh vacuum main cavity to feed the UHV sample into the sample storage frame for long-term storage, or feed the UHV sample into the sample storage groove for optical observation, or transfer the UHV sample to other ultrahigh vacuum devices. According to the invention, the sample is kept in an ultra-low temperature state, the getter pump ensures that the sample is always in an ultra-high vacuum environment, the corrugated pipe is adjusted to realize axial movement of the sample storage groove, the distance between the sample and the glass observation window is adjusted to enable the sample to be close enough, and complex optical characterization such as large-angle observation and micro-area observation of the sample is realized.

Description

technical field [0001] The invention belongs to the field of ultra-high vacuum equipment, and in particular relates to a portable ultra-high vacuum cryogenic observation chamber with a micro-area characterization function and an operating method thereof. Background technique [0002] Ultra-high vacuum systems (UHV) are widely used in various research fields such as semiconductor, machining, physics, chemistry, materials and biological sciences. The materials prepared under the UHV system (hereinafter referred to as UHV materials) are of high quality, less impurities, and have high scientific research value. However, the surface of UHV materials is relatively sensitive and requires high vacuum and temperature conditions. Therefore, after the sample is prepared in the ultra-high vacuum system, in order to ensure its stable properties, it is usually necessary to perform structural characterization and optical analysis in an environment that does not break the ultra-high vacuum...

AI Technical Summary

Problems solved by technology

[0004] At present, there is no good optical path design that can achieve micro-area and large-angle observation capabilities without destroying the ultra-high vacuum environment of UHV samples. At the same time, it has good portability and can ensure the observation of low-temperature storage conditions during the carrying process. chamber equipment

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