Flexible sensor capable of simultaneously detecting pressure-strain bimodal signals and preparation method thereof

Abstract

The invention discloses a flexible sensor capable of simultaneously detecting pressure-strain dual-mode signals and a preparation method. The sensor comprises a lower packaging protection layer, a lower electrode plate, first metal lead layers, a porous dielectric layer, second metal lead layers, an upper electrode plate and an upper packaging protection layer. The lower electrode plate and the upper electrode plate are made of low-dimensional nano materials, when the device is prepared, the low-dimensional nano material of the lower electrode plates are diffused towards the upper surface of the lower packaging protection layer to form a first diffusion layer, and the low-dimensional nano materials of the upper electrode plate are diffused towards the upper surface of the porous dielectric layer to form a second diffusion layer; the lower electrode plate and the upper electrode plate serve as electrode plate parts of the capacitor structure and are used for sensing pressure signals, and serve as strain gauge structures and are used for sensing stretching signals. The preparation method of the sensor is simple, two ends of the low-dimensional nano material are embedded into the upper and lower elastomers, so that the upper and lower layers form effective connection, and later additional assembly and adhesion are not needed.

Description

technical field [0001] The invention relates to a flexible sensor, in particular to a pressure-strain dual-mode flexible sensor based on low-dimensional nanomaterials and a preparation method thereof. Background technique [0002] Wearable electronic devices have attracted extensive attention due to their great potential in human motion monitoring, artificial intelligence devices, and bioelectronics. In recent years, with the development of low-dimensional nanomaterials such as metal nanowires, carbon nanotubes, graphene, carbon black, MXene, etc., great progress has been made in flexible sensors with high sensitivity or high stretchability. [0003] The sensing mechanism of flexible strain or pressure sensors is based on the fact that when the sensor is subjected to tension / pressure, the flexible substrate of the sensor undergoes tensile / compressive deformation, and the structural size of the sensitive layer attached to the flexible substrate deforms with the flexible subst...

AI Technical Summary

Problems solved by technology

However, when there are two different excitation signals at the same time, such as tangential tension and normal pressure acting at the same time, this type of sensor cannot distinguish and identify the excitation signals very well.

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