Compound control system and method for piezoelectric precision gas flow valve
A compound control and flow valve technology, applied in electric controllers, controllers with specific characteristics, etc., can solve the problems of poor control accuracy and slow response speed, and achieve improved nonlinearity, response speed, and particle search. effect of ability
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[0054] like figure 1 As shown, this embodiment provides a composite control system for a piezoelectric precision gas flow valve, which includes:
[0055] The feedforward compensation controller adopts the inverse model of the improved PI hysteresis model as the feedforward compensation controller. The input of the feedforward compensation controller is the target flow rate of the piezoelectric precision gas flow valve, and the output is the compensation control voltage;
[0056] Fuzzy adaptive PID feedback controller, the input of the fuzzy adaptive PID feedback controller is the error between the target flow rate and the actual flow rate of the piezoelectric precision gas flow valve and the error change rate, and the output feedback control voltage;
[0057] The accumulation drive controller is used for accumulating the compensation control voltage output by the feedforward compensation controller and the feedback control voltage output by the fuzzy adaptive PID feedback cont...
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