Resonant accelerometer structure with low temperature sensitivity

Abstract

The invention discloses a resonant accelerometer structure with low temperature sensitivity, wherein the resonant accelerometer structure comprises a silicon structure layer; the silicon structure layer comprises a sensitive mass block, first-stage lever amplification mechanisms, direction limiting mechanisms and two double-end fixed tuning fork resonators, and the two double-end fixed tuning fork resonators are adjacently arranged; and one end of each double-end fixed tuning fork resonator is connected with one first-stage lever amplification mechanism through one direction limiting mechanism, the other end of each double-end fixed tuning fork resonator is connected with one resonator anchor point through one direction limiting mechanism, the sensitive mass block is connected with fixed frames through the supporting folding beams, and an integral structure anchor point is arranged between each two fixed frames. The first-stage lever amplification mechanisms connected with the two double-end fixed tuning fork resonators are in two different forms and are symmetrically arranged to form differential output of an accelerometer. According to the invention, the cross sensitivity of acceleration signals can be eliminated, the frequency drift of the accelerometer caused by working temperature change is reduced or even eliminated, and the temperature performance of the accelerometer is improved.

Description

technical field [0001] The invention relates to the fields of micro-mechanical electronic systems (MEMS) and micro-inertial devices, in particular to a low-temperature-sensitivity resonant accelerometer structure. Background technique [0002] Silicon microresonant accelerometer is a typical MEMS (Micro Electromechanical system, micro-electromechanical system) inertial sensor. Its processing technology is compatible with microelectronic processing technology and can be mass-produced. It has the characteristics of low power consumption, high reliability, easy intelligence and digitalization, and can meet harsh environment applications. It is one of the hot directions in the development of accelerometers today. It has important military value and broad civilian prospects. [0003] At present, the existing silicon microresonant accelerometers are generally composed of a resonator, a mass and a glass substrate. The two resonators have the same size and are symmetrically arranged...

AI Technical Summary

Problems solved by technology

For example, the application publication number in the prior art is CN111812355A, which discloses a silicon micro-resonant accelerometer with low stress sensitivity, specifically discloses a double-ended fixed tuning fork resonator, a micro-lever amplifying mechanism, and a mass block, which has a simple structure and temperature stability. Good, but the two resonators are not in adjacent positions, and the thermal stresses generated by the two resonators are different due to the different temperatures of the positions, which makes the drift of the resonant frequency of the two resonators inconsistent, and the temperature drift caused by the two resonators cannot be eliminated. Accelerometer Frequency Variation Effect

[0004] In addition, the working sensitive object of the accelerometer resonator is the axial force, and the non-axial force is easy to cause the drift of the resonator, which brings the problem of cross sensitivity

In the existing accelerometer structure, there is no clear direction-defining structure to ensure the unidirectional sensitivity of the resonator

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