31results about How to "Eliminate cross-sensitivity" patented technology

The invention discloses a high-temperature and high-pressure temperature calibration type optical fiber Fabry-Perot acceleration sensor based on a composite cavity. The acceleration sensor is used for monitoring flow-induced vibration of a heat transfer tube of a pressurized water reactor steam generator in an environment of 350 DEG C and 17.5 MPa. The sensor comprises a packaging base, a gold-plated optical fiber, an optical fiber insertion core, a collimator tube, a spherical lens, a 45-degree dip angle metal reflector, a sensing chip and a sealing cover plate. The sensing chip is of a three-layer sealing structure and is formed by anodic bonding of a glass substrate and a silicon diaphragm; the silicon diaphragm is integrated with eight symmetrical hollow cantilever beams and a central mass block. The composite cavity comprises a vibration cavity (25 [mu] m) and a temperature cavity (400 [mu] m), and the end face of the optical fiber is not used as a reflecting surface, so that spatial separation and temperature compensation are realized. And the symmetrical cantilever beams reduce transverse crosstalk. And a light path is turned by 90 degrees through a 45-degree 4J29 reflecting mirror, and laser welding sealing is performed. The volume is 20 * 10 * 10 mm, the normal-temperature sensitivity is 4.53 nm / g, the inherent frequency is 7418.8 Hz, the transverse crosstalk is 0.281%, the resolution ratio is 4.4 mg, and the measuring range is + / -238 g; drift at the temperature of 350 DEG C and under the pressure of 17.5 MPa for 60 hours; the wavelength is 0.1 nm.