Multi-gas sensing device

A sensing device, multi-gas technology, applied in the measurement of color/spectral characteristics, etc., can solve the problems of reducing the accuracy and long-term stability of the sensor, unable to realize multi-gas sensing, and different optical path lengths, etc.

Inactive Publication Date: 2007-05-23
IND TECH RES INST
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Problems solved by technology

[0007] 2. The optical path lengths of the reference light source and the detection light source are different
When the ambient temperature, pressure or material properties change, the refractive index of the air and the material will change, and the optical path length will also change accordingly. If the optical path length of the reference light source and the detection light source are different, the initial signal will be Values ​​are susceptible to changes in ambient temperature, pressure, or material properties, reducing sensor accuracy and long-term stability
[0008] 3. Unable to realize multi-gas sensing
[0009] 4. It is impossible to greatly reduce the thickness of the gas sensor

Method used

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Embodiment Construction

[0073] Please refer to FIG. 2A , which is a schematic diagram of a preferred embodiment of the multi-gas sensing device of the present invention. This embodiment is mainly used to realize single gas sensing, and the sensing device 2 is formed on a substrate 20 . The material of the substrate 20 is semiconductor material, polymer material, metal material or soft material. The sensing device 2 includes a light emitter 21 , a planar optical waveguide 22 , a filter 23 and at least one light detector 24 . The front end 223 of the planar optical waveguide 22 is coupled to the light emitter 21 to receive the detection light emitted by the light emitter 21 . The light emitter 21 can be a side-firing laser diode, a surface-firing laser diode or a light-emitting diode (LED), and the choice of light wavelength can be determined according to the type of gas to be measured.

[0074] The planar optical waveguide 22 also has a sensing channel 221 and a reference channel 222 . The sensing ...

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Abstract

The invention discloses a multi-gas sensing device, using the planar waveguide circuit to construct the multi-gas sensing platform with sensing channel and reference channel, substantially thin gas sensor structure, to increase gas sensor accuracy and long-term stability, and reduce the response time. It can be widely used in factory work site's safety monitoring, staff security monitoring, factory disaster warning, restricted regional security monitoring, pipeline leak investigation, environmental steam locomotive emission monitoring, and home environment quality monitoring.

Description

technical field [0001] The present invention relates to a gas sensing device, in particular to a multi-gas sensing device which utilizes a planar optical waveguide circuit to construct a sensing channel and a reference channel for sensing at least one gas. Background technique [0002] The qualitative and quantitative detection of multiple gases has a wide range of applications in the fields of environmental monitoring, household alarms, chemical control, greenhouse environment control and aviation. The use of gas sensors for qualitative and quantitative research on multiple gases can greatly reduce measurement costs, reduce measurement cycles, and enable real-time monitoring and measurement. However, due to the current gas sensors, such as semiconductor oxide type, metal oxide type, electrochemical type or solid electrolyte type, the problem of cross sensitivity (Cross sensitivity) generally exists, and the cross sensitivity will greatly reduce the repeatability and reliabi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/25
Inventor 蔡明郎张金生邱以泰朱俊勋
Owner IND TECH RES INST
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