Multi-gas sensing device
A sensing device, multi-gas technology, applied in the measurement of color/spectral characteristics, etc., can solve the problems of reducing the accuracy and long-term stability of the sensor, unable to realize multi-gas sensing, and different optical path lengths, etc.
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[0073] Please refer to FIG. 2A , which is a schematic diagram of a preferred embodiment of the multi-gas sensing device of the present invention. This embodiment is mainly used to realize single gas sensing, and the sensing device 2 is formed on a substrate 20 . The material of the substrate 20 is semiconductor material, polymer material, metal material or soft material. The sensing device 2 includes a light emitter 21 , a planar optical waveguide 22 , a filter 23 and at least one light detector 24 . The front end 223 of the planar optical waveguide 22 is coupled to the light emitter 21 to receive the detection light emitted by the light emitter 21 . The light emitter 21 can be a side-firing laser diode, a surface-firing laser diode or a light-emitting diode (LED), and the choice of light wavelength can be determined according to the type of gas to be measured.
[0074] The planar optical waveguide 22 also has a sensing channel 221 and a reference channel 222 . The sensing ...
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