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Inductive magnetic sensor for suppressing directional crosstalk and preparation method thereof

A magnetic sensor and inductance technology, applied in the field of inductive magnetic sensor and its preparation, can solve the problems of poor stability and consistency, easy crosstalk, high cost, eliminate cross-sensitivity between axes, improve sensing performance, and suppress inter-axis The effect of crosstalk

Active Publication Date: 2020-12-18
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The magnetic field is a vector field. The existing magnetic sensors are prone to crosstalk and cross-sensitivity between the axes. The single-axis sensing performance of the magnetic sensor is not high, and the stability and consistency are poor. It is not suitable for mass production and the cost is high.

Method used

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  • Inductive magnetic sensor for suppressing directional crosstalk and preparation method thereof
  • Inductive magnetic sensor for suppressing directional crosstalk and preparation method thereof

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preparation example Construction

[0018] The preparation method of the inductive magnetic sensor for suppressing directional crosstalk of the present invention includes the following steps: providing an insulating and non-magnetic substrate, fabricating a sensing coil on the insulating and non-magnetic substrate, covering the surface of the sensing coil with an insulating layer, and The bias coil is made on the insulating layer, the bias coil and the sensing coil are partially overlapped, the current direction of the overlapping part of the bias coil and the sensing coil is perpendicular to each other, and the overlapping part of the bias coil and the sensing coil covers another insulating layer , covering the magnetic layer with another insulating layer.

[0019] The present invention provides current to the bias coil, and biases the direction of the non-sensitive axis in the magnetic layer to the insensitive point of the magnetic field, that is, in a neighborhood of the bias magnetic field, the change of the ...

Embodiment 1

[0021] Use silicon dioxide as the substrate, and make the first rectangular planar coil on it by sputtering or electroplating, cover a layer of silicon dioxide film on the first rectangular planar coil, and make the second rectangular planar coil on the film. A planar coil, the second rectangular planar coil partially overlaps with the first rectangular planar coil, and the coil wires in the overlapped part are perpendicular to each other, and a layer of silicon dioxide film is covered on the second rectangular planar coil, and on the silicon dioxide film In the area where the two coils overlap, a layer of FeNi alloy (also can be made of any other magnetically permeable material, such as silicon steel, FeCo alloy) film layer is made by sputtering or electroplating, and the FeNi alloy film layers covering different overlapping areas are not connected. And the minimum distance is greater than the thickness of the film.

Embodiment 2

[0023] In the substrate region of the corresponding position of the FeNi alloy thin film layer in embodiment one, at first make the FeNi alloy thin film layer on it by the method of sputtering or electroplating, on the FeNi alloy thin film layer, make the silicon dioxide thin film layer, with sputtering Or the electroplating method is used to make a rectangular planar coil on it, cover a layer of silicon dioxide film on the coil, and make another rectangular planar coil on the film. The planar coil overlaps with the first rectangular planar coil, and the coil of the overlapping part The wires are perpendicular to each other, and a layer of silicon dioxide film is covered on the second planar coil, and a layer of FeNi alloy film layer is made by sputtering or electroplating in the area where the two coils overlap on the film, covering the FeNi alloy in different overlapping areas. The thin film layers are not connected, and the minimum distance is greater than the thickness of t...

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Abstract

The present invention provides an inductance magnetic sensor for inhibiting direction crosstalk and a preparation method thereof. The sensor comprises an insulation non-conductive magnet substrate, a sensing coil, a bias coil, insulation layers and a permeability magnetic material layer. The sensing coil is located on the insulation non-conductive magnet substrate, the bias coil is located between the two insulation layers and is partly overlapped with the sensing coil, and the permeability magnetic material layer is located the uppermost insulation layer. The inductance magnetic sensor for inhibiting direction crosstalk and the preparation method thereof can inhibit the inter-axis crosstalk of the sensor, eliminate inter-axis cross sensitivity and improve the sensing performance of the magnetic sensor.

Description

technical field [0001] The invention relates to a magnetic sensor and a preparation method thereof, in particular to an inductive magnetic sensor capable of suppressing directional crosstalk and a preparation method thereof. Background technique [0002] Magnetic sensors are one of the most widely used sensors, and can directly or indirectly measure many physical, chemical, biological and other parameters through magnetic field measurement. The magnetic field is a vector field. The existing magnetic sensors are prone to crosstalk and cross-sensitivity between the axes. The single-axis sensing performance of the magnetic sensor is not high, the stability and consistency are poor, it is not suitable for mass production and the cost is high. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide an inductive magnetic sensor that suppresses directional crosstalk, which can suppress crosstalk between axes of the sensor, elim...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/06
CPCG01R33/06
Inventor 文玉梅李平卞雷祥
Owner SHANGHAI JIAOTONG UNIV
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