Double-microring resonator optical biochemical sensing chip based on vernier effect

A micro-ring resonant cavity and sensor chip technology, which is applied in the measurement of phase influence characteristics, etc., to achieve the effects of cost reduction, wide application range, and standardized manufacturing process

Inactive Publication Date: 2013-11-27
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

[0005] In the existing technical field of detection of specific chemical or biological substances such as gas molecules or biomolecules, an example of combining the miniaturization advantages of SOI-based on-chip systems with the advantages of system measurement accuracy based on the vernier effect hardly

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  • Double-microring resonator optical biochemical sensing chip based on vernier effect
  • Double-microring resonator optical biochemical sensing chip based on vernier effect
  • Double-microring resonator optical biochemical sensing chip based on vernier effect

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Embodiment Construction

[0016] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0017] Such as figure 1 and figure 2 As shown, the optical biochemical sensor chip based on the vernier effect in this embodiment includes a silicon base 61 layer, a silicon dioxide layer 62 and a single crystal silicon layer 63 that are sequentially stacked and bonded from bottom to top. SOI substrate, the single crystal silicon layer 63 of the SOI substrate includes an input straight waveguide 11 (12), an output straight waveguide 13 (14), a first microring resonator 3 and a second microring resonator 4, wherein the first The microring resonator 3 includes a ring waveguide, the first microring resonator 3 is respectively coupled with the input straight waveguide 11 (12) and the output straight waveguide 13 (14), and the second microring resonator 4 is connected to the first microring resonator The ring resonator 3 is located on the same p...

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Abstract

The invention provides a double-microring resonator optical biochemical sensing chip based on the vernier effect and aims to solve the detection problem of some biochemistry matters. The double-microring resonator optical biochemical sensing chip mainly comprises an input straight waveguide, an output straight waveguide and two microring resonators, wherein the first microring resonator comprises an annular waveguide and is coupled with the input straight waveguide and the output straight waveguide; the second microring resonator is positioned on the inner side of the annular waveguide of the first microring resonator and has a free spectral range different from that of the first microring resonator, and the two microring resonators are connected in an optical coupling manner. Through the above scheme adopted by the optical biochemical sensing chip, the second optical resonator is positioned on the inner side of the first optical resonator and connected with the first optical resonator in a lateral coupling manner to form the vernier effect and detect the influence on an optical signal from external substances. Under the condition of meeting the same sensing performance, the size of the optical biochemical sensing chip is greatly reduced, and miniaturization of the optical biochemical sensor and the on-chip sensing system are favorably realized.

Description

technical field [0001] The invention relates to the detection technology of specific chemical or biological substances such as gas molecules or biomolecules, specifically relates to the field of optical sensing technology, in particular to a double microring resonant cavity optical biochemical sensor chip based on the vernier effect. Background technique [0002] A biochemical sensor is a combination of a bioactive material and a corresponding transducer, which is used to measure a specific chemical or biological substance. Since the determination of these chemical or biological substances is of great significance in environmental monitoring, disease monitoring and drug development, the research on biochemical sensors has become very important. At present, typical optical biochemical sensors can be mainly divided into two categories: fluorescent-labeled optical biochemical sensors and unlabeled optical biochemical sensors. According to relevant literature, although fluoresce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/41
Inventor 王卓然袁国慧高亮
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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