Dual-laser interference nanoscale positioning measurement system
A positioning measurement, nano-scale technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as signal acquisition and demodulation difficulties, and achieve the effect of improving resolution
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[0046] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0047] The purpose of the present invention is to provide a dual-laser interference nanoscale positioning measurement system, which aims to improve the measurement resolution and realize fast acquisition and demodulation of interference signals, which can be applied to the technical field of displacement measurement.
[0048] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be f...
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