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Manufacturing method of array substrate, array substrate and display panel

A technology of an array substrate and a manufacturing method, which is applied in the display field, can solve the problems of cracking of the protective layer, liquid crystal bubbles, rough particles, etc., and achieve the effect of improving the smoothness

Active Publication Date: 2022-05-06
HKC CORP LTD
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Problems solved by technology

[0003] The embodiments of the present invention provide a method for manufacturing an array substrate, an array substrate, and a display panel, aiming to solve the technical problem in the prior art that the surface particles of the color-resist layer of the array substrate are rough, which causes the protective layer to rupture, thereby causing bubbles in the liquid crystal.

Method used

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  • Manufacturing method of array substrate, array substrate and display panel
  • Manufacturing method of array substrate, array substrate and display panel
  • Manufacturing method of array substrate, array substrate and display panel

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no. 1 example

[0049] refer to Figure 4 , Figure 4 As the first embodiment of the manufacturing method of the array substrate of the present invention, the manufacturing method of the array substrate includes the following steps:

[0050] Step S10, coating a first protective layer on the thin film transistor substrate;

[0051] Optionally, the first protection layer may be silicon nitride material.

[0052] Step S20, forming a color resist layer on the first protective layer;

[0053] The thin film transistor substrate and the color resist layer are in a vacuum state;

[0054] Step S30, applying an alternating electric field with preset electric field parameters above the color-resist layer to eliminate particles on the surface of the color-resist layer;

[0055] The alternating electric field is generated by a radio frequency power supply; the color-resisting layer is the color-resisting layer, and the particles on the surface of the color-resisting layer include hydrocarbon-containin...

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Abstract

The invention discloses an array substrate and a manufacturing method thereof. The array substrate manufacturing method includes: coating a first protective layer on a thin film transistor substrate; sequentially forming a light-shielding layer and a color-resisting layer on the first protective layer; Applying an alternating electric field with preset electric field parameters above the color resist layer to eliminate particles on the surface of the color resist layer; forming the array substrate according to the thin film transistor substrate after removing the particles. It solves the technical problem that the surface particles of the color-resist layer of the array substrate are rough, which causes the protective layer to break and then causes the liquid crystal to generate bubbles, and achieves the technical effect of improving the color-resist layer.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to a method for manufacturing an array substrate, an array substrate and a display panel. Background technique [0002] COA (Color Filter On Array, array substrate and color filter integration) technology is to integrate the original color filter substrate and thin film transistor substrate, that is, to coat the color resist on the completed array substrate to form a color filter layer In the traditional integration technology of array substrate and color filter, the passivation layer on the color resistance layer is cracked or the film quality of the transparent electrode is uneven due to the rough surface particles of the color resistance layer, resulting in color resistance The gas in the passivation layer overflows to the liquid crystal layer, causing the liquid crystal to generate bubbles. Contents of the invention [0003] The embodiments of the present invention p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1362G02F1/1368
CPCG02F1/136222G02F1/1368
Inventor 卓恩宗朱虹玲韦超都桂卿郑浩旋
Owner HKC CORP LTD
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