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Self-aligned light angle sensor using thin metal silicide anodes

A metal silicide and light angle technology, which is applied to optical sensors, sensors, and optical devices, etc., can solve the problems of reducing the light collection efficiency of photodetectors and the reduction of light collection efficiency of photodetectors.

Pending Publication Date: 2021-10-12
ANALOG DEVICES INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the grooves reduce the light collection efficiency of these photodetectors because light that passes through the holes reaching the grooves will not be detected by the photodetectors
[0008] In a micromechanical device, the width of the trench can be several microns, and depending on the width of the slit, the light collection efficiency of the photodetector can be reduced by 10% to 50%

Method used

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  • Self-aligned light angle sensor using thin metal silicide anodes
  • Self-aligned light angle sensor using thin metal silicide anodes
  • Self-aligned light angle sensor using thin metal silicide anodes

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Embodiment Construction

[0064] FIELD OF THE INVENTION The present invention relates to a self-aligning optical angle sensor. More specifically, the present disclosure describes apparatus and methods related to the fabrication of self-aligned optical angle sensors using thin metal suicide anodes, and applications thereof.

[0065] The following description and accompanying drawings set forth certain illustrative embodiments of the disclosure in detail, indicating several exemplary ways in which the various principles of the disclosure may be carried out. However, the illustrative examples are not exhaustive of the many possible embodiments of the disclosure. Where applicable, other objects, advantages and novel features of the disclosure are set forth in the accompanying drawings.

[0066] In the current state of the art, light angle sensors usually require a high degree of accuracy of the aperture during manufacturing (packaging). This requires multiple layers of registration, adding to the complex...

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PUM

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Abstract

The invention relates to a self-aligned light angle sensor using thin metal silicide anodes. Aspects of the embodiments are directed to non-contact systems, methods and devices for optical detection of objects in space at precise angles. This method involves the design and fabrication of photodiode arrays for measuring angular response using self-aligned Schottky platinum silicide (PtSi) PIN photodiodes (PN-diodes with an intrinsic layer sandwiched in between) that provide linear angular measurements from incident light in multiple dimensions. A self-aligned device is defined as one in which is not sensitive to photomask layer registrations. This design eliminates device offset between "left" and right" channels for normal incident light as compared to more conventional PIN diode constructions.

Description

[0001] Cross References to Related Applications [0002] This application is related to U.S. Utility Patent Application No. 13 / 924,797, entitled "Optical Angle Measurement," filed June 24, 2013, currently assigned U.S. Patent No. 9,435,641, and to US Utility Patent Application No. 13 / 329,510, entitled "Mirrorless Optical Position Measurement Sensor," currently assigned US Patent No. 9,702,690, the entire contents of which are incorporated herein by reference. technical field [0003] The invention relates to a self-aligning light angle sensor. More specifically, the present disclosure describes apparatus and methods related to the fabrication of self-aligned optical angle sensors using thin metal suicide anodes, and applications thereof. Background technique [0004] Light angle sensors can be used in a variety of applications such as gestures for user interface control in portable devices, object position tracking, industrial and automation monitoring, angle sensing, proxi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
CPCG01B11/26H01L31/02164H01L31/102H01L31/105H01L31/108H01L31/022408H01L31/028H01L31/03044H01L27/1446H01L31/02024G01S7/4816G01S17/48A61B5/14552A61B2562/0233G01S3/7835G01S3/781Y02P70/50G01B11/272H01L29/66143H01L29/872
Inventor S·德立瓦拉P·W·斯蒂芬斯W·E·欧玛拉
Owner ANALOG DEVICES INC
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