Czochralski silicon rod crystal extraction device and crystal extraction process thereof

Abstract

The invention provides a Czochralski silicon rod crystal extraction device. The device comprises a first rotating shaft, a second rotating shaft, a mooring rope wound around the first rotating shaft, a first driving part used for driving the first rotating shaft to rotate, and a second driving part used for driving the second rotating shaft, one end of the mooring rope is connected with the first rotating shaft, and the other end is connected with the monocrystalline silicon rod through seed crystal; the first driving part drives the first rotating shaft to enable the silicon single crystal rod to move up and down along the axis direction of the silicon single crystal rod; and the second driving part drives the second rotating shaft to enable the single crystal silicon rod to rotate and move along the axis of the single crystal silicon rod. The invention further provides a Czochralski silicon rod crystal extraction process. The crystal extraction device provided by the invention is simple in structural design and easy to operate, the silicon single crystal rod can be safely taken out and placed in a crystal extraction cylinder, the service life of the crystal extraction device is prolonged, and the crystal extraction device is suitable for crystal extraction operation of the silicon single crystal rods with various diameters, wide in applicability, good in crystal extraction effect and high in working efficiency.

Description

technical field [0001] The invention belongs to the technical field of solar Czochralski monocrystalline silicon monocrystalline silicon, and in particular relates to a crystallization device and a crystallization process for a Czochralski monocrystalline silicon rod. Background technique [0002] Single crystal silicon rods are gradually tilted and large in size. The diameter of the current drawn large-size single crystal silicon rods can reach up to 310mm. Generally, the diameter of single crystal silicon rods exceeds 240mm, which is called large diameter single crystal silicon rods. The existing crystal pulling process can pull large-diameter single crystal silicon rods of 4-5m. This kind of single crystal silicon rods are longer in length, making their overall weight heavier. The monocrystalline silicon rod is affected by the inertial jump, and the optical cable is prone to breakage, especially the copper cross of the lifting head is severely worn, which poses a risk of ...

AI Technical Summary

Problems solved by technology

[0003] The invention provides a Czochralski monocrystalline silicon rod crystal extraction device and its crystal extraction process, especially suitable for the crystal extraction operation of large-diameter single crystal silicon rods, which solves the existing problems caused by the inability to change the speed during the crystal extraction operation. Due to the technical problem of broken ring or seed crystal fracture, the crystal extraction device proposed by the present invention has a simple structural design and is easy to operate, and can safely take out the single crystal silicon rod and place it in the crystal extraction cylinder, which improves the service life of the crystal extraction device , suitable for crystallization operations of single crystal silicon rods of various diameters, wide applicability, good crystallization effect, and high work efficiency

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