Nondestructive testing method for film coating debonding defect based on grating laser ultrasonic sound spectrum
A laser ultrasonic, non-destructive testing technology, applied in the use of sound waves/ultrasonic waves/infrasonic waves to analyze solids, use sound waves/ultrasonic waves/infrasonic waves for material analysis, measuring devices, etc. Detection and other problems, achieve high sensitivity and spatial resolution, and solve the effect of surface blind spots
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[0015] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0016] The present invention proposes a non-destructive testing method for debonding defects of thin film coatings based on grating laser ultrasonic sound spectrum, such as figure 1 shown. First, the high-energy pulsed laser beam 1 irradiated onto the surface of the film coating structure 3 to be tested is used to form a grating laser spot 4 with a period of d by using an equidistant optical mask or a microlens array 2, and the surface of the film coating structure to be tested is thermally expanded during the period Under excitation, an ultrasonic wave corresponding to the wavelength λ (λ=d) is excited. When there is no debonding defect in the measured area, the excited ultrasonic wave is Rayleigh wave 5; when there is a disbonding defect 7 in the measured area, the excited ultrasonic wave The energy is confined to a region of only ...
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