A method, device, and storage medium for absolute detection of rotation and translation of surface shapes of irregularly shaped optical elements based on deep learning
An optical element and deep learning technology, applied in the fields of precision measurement technology and deep learning, can solve the problems of long adjustment time, complicated process, and low efficiency, and achieve the effects of improving efficiency, low cost, and high measurement accuracy
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Embodiment 1
[0066] A method for absolute detection of rotation and translation of the surface shape of high-precision irregular-shaped optical elements based on deep learning, such as Figure 5 shown, including:
[0067] (1) First use the interferometer to perform relative detection of three positions on the surface shape of the irregular-shaped optical element, and then obtain the rotation and translation of the irregular-shaped optical element through the convolutional neural network;
[0068] (2) The rotation and translation obtained by the convolutional neural network in step (1) are substituted into the wavefront recovery algorithm of the irregularly shaped optical element to obtain the absolute surface shape of the irregularly shaped optical element.
Embodiment 2
[0070] According to the method of absolute detection of rotation and translation of a surface shape of a high-precision irregular-shaped optical element based on deep learning described in Embodiment 1, the difference is that:
[0071] In step (1), the rotation amount and translation amount of the irregular shape optical element are obtained through the optimized rotation amount and translation amount information extraction model of the irregular shape optical element, and the optimized rotation amount and translation amount of the irregular shape optical element The training process of the information extraction model includes the following steps:
[0072] A. Make four kinds of irregular-shaped optical elements to generate data sets with different amounts of rotation and translation; the specific implementation process of step A includes:
[0073] Perform arbitrary rotation and translation operations on the irregular shape element at the origin, and obtain the binarized image...
Embodiment 3
[0119] A computer device, comprising a memory and a processor, the memory stores a computer program, and when the processor executes the computer program, the method for absolutely detecting the rotation and translation of the surface shape of an irregularly shaped optical element based on deep learning as described in Embodiment 1 or 2 is realized step.
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