Large-scale integrated electro-optical micro-ring optical phased array

Abstract

The invention discloses a large-scale integrated electro-optical micro-ring optical phased array which comprises a silicon substrate, a silicon dioxide buried layer and a silicon core layer from bottom to top. The silicon dioxide buried layer is attached to the silicon substrate; the grating coupler is used for receiving a laser light source and guiding the laser light source to the light beam splitting network, splitting the light source output by the grating coupler into multiple paths of signals, transmitting the signals to the phase tuning region, generating phase difference light beams, and emitting the generated phase difference light beams to a free space; the phase tuning area comprises a tuning array formed by a plurality of array elements, a straight waveguide connected with the optical beam splitting network, and a control bus used for controlling voltage output of the array elements; each array element comprises a directional coupler, a p-i-n modulator and an electrode plate; and the directional coupler couples optical signals on the straight waveguide to the p-i-n modulator, and the p-i-n modulator is connected with a control bus through an electrode plate and used for enabling all paths of light to generate phase differences.

Description

technical field

[0001] The invention belongs to the technical field of laser radar communication, and in particular relates to a large-scale integrated electro-optic microring optical phased array. Background technique

[0002] With the continuous development of smart cars, unmanned driving has become a popular development project for auto companies in recent years. As one of the key core components of smart cars, lidar is mainly used to transmit the detected information to the cloud computing system to realize the perception of the complex traffic environment on land. Generally, lidar is divided into two categories: mechanical lidar and solid-state lidar. Mechanical laser radar uses mechanical rotating parts as the realization of beam scanning, which can realize large-angle scanning, but the scanning frequency is low and assembly is difficult. In recent years, mechanical laser radar has been initially applied in smart cars, but because it cannot realize batch Production c...

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