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Dislocation two-dimensional grating array-based three-dimensional micro-displacement sensor with double-grating structure

A micro-displacement sensor, two-dimensional grating technology, applied in instruments, optical devices, measuring devices, etc., can solve the problems of high cost, low integration, complex optical path, etc., and achieve the effect of improving accuracy and achieving high integration

Pending Publication Date: 2021-12-21
ZHONGBEI UNIV
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Problems solved by technology

[0003] Aiming at the technical problems of complex optical path, large volume, low integration and high cost in the above method, the present invention provides a three-dimensional double grating structure based on dislocation two-dimensional grating array with high integration, high measurement accuracy and small volume. micro displacement sensor

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  • Dislocation two-dimensional grating array-based three-dimensional micro-displacement sensor with double-grating structure
  • Dislocation two-dimensional grating array-based three-dimensional micro-displacement sensor with double-grating structure
  • Dislocation two-dimensional grating array-based three-dimensional micro-displacement sensor with double-grating structure

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Embodiment Construction

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral Ground connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediary, and it can be the internal...

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Abstract

The invention belongs to the technical field of three-dimensional micro-displacement sensors, and particularly relates to a dislocation two-dimensional grating array-based three-dimensional micro-displacement sensor with a double-grating structure, which comprises a laser, a collimation beam expander, an upper-layer two-dimensional grating, a lower-layer dislocation grating and a four-quadrant detector, a collimation beam expanding lens is arranged above the laser, an upper-layer two-dimensional grating is arranged on the collimation beam expander, a lower-layer dislocation type grating is arranged on the upper-layer two-dimensional grating, and a four-quadrant detector is arranged on the lower-layer dislocation type grating. By adopting the double-layer grating structure and utilizing the self-imaging effect of the two-dimensional grating in the near-field area, the transmission light intensity changes along with displacement, photoelectric conversion is achieved through the four-quadrant detector, accurate three-dimensional displacement measurement is conducted through refined electrical signals output by the overall structure, and the accuracy of the overall structure is improved. And meanwhile, high integration of the whole system is realized by utilizing a four-quadrant structure.

Description

technical field [0001] The invention belongs to the technical field of three-dimensional micro-displacement sensors, and in particular relates to a three-dimensional micro-displacement sensor with a double grating structure based on a dislocation two-dimensional grating array. Background technique [0002] Ultra-precise positioning detection technology is an important technical field of modern precision manufacturing, and nanoscale multi-dimensional displacement measurement technology is one of the key issues restricting the development of ultra-precise positioning technology. Among them, the nano-grating detection method has been widely used due to its advantages such as high resolution, small size, and anti-electromagnetic interference. At present, most of the multi-dimensional micro-displacement detection methods based on grating displacement detection technology are based on the principle of Doppler frequency shift, and an integrated system is composed of multiple one-di...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 辛晨光李孟委亓杰金丽李晋华
Owner ZHONGBEI UNIV
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