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Wide-range thermocouple vacuum gauge

A vacuum gauge with a wide range of technology, which is applied to vacuum gauges that measure medium pressure by measuring changes in the thermal conductivity of the medium, and can solve problems such as large influence of ambient temperature, low accuracy, and narrow vacuum measurement range. Achieve the effects of eliminating the impact of measurement accuracy, ensuring accuracy, and reducing production costs

Pending Publication Date: 2021-12-31
CHENGDU GUOGUANG ELECTRIC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the problems of narrow vacuum measurement range, low accuracy and large influence of ambient temperature in the prior art, and provide a wide range thermocouple vacuum gauge

Method used

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  • Wide-range thermocouple vacuum gauge

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Embodiment Construction

[0034] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are part of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0035] In the description of the present invention, it should be noted that the terms belonging to "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated direction or positional relationship is based on the direction or positional relationship described in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specif...

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Abstract

The invention discloses a wide-range thermocouple vacuum gauge, which belongs to the technical field of vacuum measurement, and the gauge comprises a vacuum gauge tube, a heating current supply unit, an analog-to-digital conversion unit and a main control unit; the heating current supply unit is used for dynamically processing electric signals of different electromotive forces output by vacuum gauge tube and providing a first heating current capable of ensuring the constant temperature of the filament for the vacuum gauge tube. According to the invention, the vacuum degree measurement of different environments is realized based on the constant temperature principle, the dynamic heating current is loaded on the vacuum gauge tube filament, and the heating current changes along with the electromotive force change, so that the measurement range of the vacuum gauge is greatly widened; meanwhile, due to the fact that the first heating current can ensure that the lamp filament is processed at constant temperature in different measurement environments, the vacuum degree information of the current measurement environment is obtained through the changed first heating current, the influence of the measurement environment temperature on the measurement accuracy can be eliminated, and the measurement accuracy is ensured.

Description

technical field [0001] The invention relates to the technical field of vacuum measurement, in particular to a wide range thermocouple vacuum gauge. Background technique [0002] Vacuum measurement contacts the vacuum environment through the vacuum gauge made of special materials, and then obtains the signal related to the pressure. The signal can be converted and processed by the subsequent signal processing circuit to display the vacuum degree of the measured vacuum environment. [0003] According to the measurement principle, vacuum measurement includes direct measurement vacuum gauge and indirect measurement vacuum gauge. Indirect measurement vacuum gauge includes compression vacuum gauge, thermal radiation vacuum gauge, ionization vacuum gauge, etc. This application mainly focuses on the thermal Dual vacuum gauge. The filament material selection principle of the vacuum gauge of the thermocouple vacuum gauge is: (1) it should have a large thermoelectric potential and the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L21/14
CPCG01L21/14
Inventor 林红任元国梁盈盈李泞
Owner CHENGDU GUOGUANG ELECTRIC
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