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Elliptical double-ring quartz crystal microbalance mass sensor

A quality sensor and quartz crystal technology, applied in the field of sensor detection, can solve problems such as uneven distribution of mass sensitivity, and achieve the effects of improving repeatability, improving measurement accuracy, and improving uniformity

Pending Publication Date: 2022-01-11
NANJING UNIV OF SCI & TECH
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  • Abstract
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  • Claims
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Problems solved by technology

[0008] Aiming at the problem of inhomogeneous mass sensitivity distribution on the surface of the existing circular double-ring electrode structure of the quartz crystal microbalance, the present invention provides an elliptical double-ring quartz crystal microbalance mass sensor, which improves the mass sensitivity distribution in all directions on the surface of the QCM mass sensor Uniformity, thereby reducing the repeatability error of QCM measurement results and improving the accuracy of QCM measurement

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  • Elliptical double-ring quartz crystal microbalance mass sensor
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  • Elliptical double-ring quartz crystal microbalance mass sensor

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Embodiment

[0044] QCM quality sensors such as Figure 5 As shown, it includes a circular quartz crystal and metal electrodes located on the upper and lower sides of the circular quartz crystal, and is divided into a full electrode area (E area), a part of the electrode area (P area) and a non-electrode area (U area). The electrode is an elliptical electrode structure, and the upper metal electrode is composed of an elliptical double-ring electrode. The long axis of the two electrodes is the QCM vibration displacement direction. The elliptical double-ring electrode is composed of an elliptical inner ring electrode and an elliptical outer ring electrode. The inner radius of the long axis of the ring electrode is P 1 , the outer radius of the major axis is P 2 , the inner radius of the minor axis is Q 1 , the outer radius of the minor axis is Q 2 , the inner radius of the major axis of the elliptical outer ring electrode is P 3 , the outer radius of the major axis is P 4 , the inner ra...

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Abstract

The invention discloses an elliptical double-ring quartz crystal microbalance mass sensor, which comprises a circular quartz crystal and upper and lower metal electrodes respectively positioned on the circular quartz crystal, the lower metal electrode is an elliptical electrode structure, the upper metal electrode is an elliptical double-ring electrode, and the long axis directions of the two electrodes are the vibration displacement direction of the quartz crystal microbalance. The elliptical double-ring electrode is composed of an elliptical inner ring-shaped electrode and an elliptical outer ring-shaped electrode concentric with the elliptical inner ring-shaped electrode. The metal electrode of the QCM mass sensor is improved and designed, and mass sensitivity curves in all directions of the surface of the QCM mass sensor are kept consistent through the elliptical double-ring-shaped electrode. According to the electrode with the special design, the uniformity of mass sensitivity distribution of the QCM mass sensor is improved, and the repeatability of a measurement result of the QCM mass sensor is improved.

Description

technical field [0001] The invention belongs to the technical field of sensor detection, in particular to an elliptical double-ring quartz crystal microbalance mass sensor. Background technique [0002] Quartz Crystal Microbalance (QCM) is an analytical instrument that uses the piezoelectric effect of quartz crystals to detect minute mass changes on the surface, and the core component is the QCM mass sensor. The QCM mass sensor is a high-precision mass sensor that converts subtle mass changes on the electrode surface into changes in vibration frequency. It has many advantages such as high sensitivity, high measurement accuracy, simple structure, low cost, and real-time online monitoring. Widely used in clinical testing, environmental testing, food safety testing, life sciences, drug research and development and other fields. [0003] The mass sensitivity of the QCM surface plays a vital role in the quantitative analysis of QCM applications, but the problem of low repeatabil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N5/00
CPCG01N5/00
Inventor 蒋海峰唐龙飞
Owner NANJING UNIV OF SCI & TECH