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Grid-controlled interface type nanofluid memristor and preparation method thereof

A memristor and fluid technology, which is applied in the field of gate-controlled interface nanofluid memristor and its preparation, can solve the problems of complicated memristor array processing technology and achieve the effect of simple processing technology

Pending Publication Date: 2022-01-18
PEKING UNIV
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this leads to a very complex fabrication process for memristor arrays

Method used

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  • Grid-controlled interface type nanofluid memristor and preparation method thereof
  • Grid-controlled interface type nanofluid memristor and preparation method thereof
  • Grid-controlled interface type nanofluid memristor and preparation method thereof

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preparation example Construction

[0049] The present invention also provides a preparation method of the interface-type nanofluid memristor, which includes the following steps.

[0050] First, a substrate 100 is provided.

[0051] Then, a nanochannel 600 is formed on top of the substrate 100 .

[0052] The present invention has no special limitation on the method of forming the nanochannel 600 , for example, a combination of electron beam lithography and plasma etching may be used.

[0053] Afterwards, a metal layer is formed on the bottom and sidewalls of the nanochannel and on the substrate surface on one or both sides of the nanochannel.

[0054] The method for forming the metal layer is not particularly limited in the present invention. For example, physical vapor deposition, electroplating, electron beam evaporation, and magnetron sputtering can be used to form the metal layer.

[0055] Next, a silicon dioxide layer is formed on the metal layer.

[0056] The present invention can use chemical vapor dep...

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Abstract

The invention relates to an interface type nanofluid memristor. The interface type nanofluid memristor comprises: a substrate; a nano channel arranged at the top of the substrate; a metal layer which covers the bottom and the side wall of the nano channel and covers the surface of the substrate on one side or two sides of the nano channel; and a silicon dioxide layer which covers part of the surface of the metal layer. According to the interface type nanofluid memristor, the metal layer is adopted as the grid control electrode, the influence of leakage current on other devices can be effectively prevented, and the processing technology of the memristor array formed by the memristor is quite simple compared with the prior art. In addition, the interface type nanofluid memristor serves as a nanofluid nerve synapse device, the function of an excitation type nano-fluid nerve synapse device can be achieved, and the function of an inhibition type nano-fluid nerve synapse device can also be achieved. In addition, the invention also relates to a preparation method of the interface type nanofluid memristor.

Description

technical field [0001] The invention relates to the technical field of micro-nano electronics, in particular to a gate-controlled interface type nanofluid memristor and a preparation method thereof. Background technique [0002] Nearly four decades after the memristor concept was proposed, Hewlett-Packard Labs made the first memristor based on a metal oxide. A wide variety of memristors have emerged so far, including inorganic metal oxide memristors, organic memristors, and perovskite memristors. The unique properties of memristors make them useful in low-power memory devices and neuromorphic computing. A liquid memristor is a type of memristor that uses soft materials including liquid metals, electrolytes, ionic liquids, and ionic gels. Liquid memristors have the characteristics of simple preparation, low cost and flexibility, and show great application potential in biomimetic neuromorphic computing structures. [0003] Although the memristor array can achieve a very hig...

Claims

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Application Information

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IPC IPC(8): H01L45/00
CPCH10N70/821H10N70/061
Inventor 张盼王玮郭业昌
Owner PEKING UNIV
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