Surface acoustic wave device performance analysis method based on hybrid algorithm
A surface acoustic wave device and analysis method technology, applied in the direction of instruments, calculations, computer-aided design, etc., can solve the problems of surface acoustic wave device errors, multi-computer memory resources, and large calculation time consumption
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[0074] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0075] as attached figure 1 As shown, a performance analysis method for surface acoustic wave devices based on a hybrid algorithm includes the following steps:
[0076] Step 1) Coupling the temperature field into the piezoelectric physical field in the form of thermal stress and thermal strain to obtain a mathematical model capable of characterizing the multi-physics coupling of SAW devices under the action of different temperature fields;
[0077] Step 2) solve the multiphysics coupling mathematical model obtained in step 1) by finite element FEM technology, and obtain the finite element model of the single-finger structure of the multiphysics surface acoustic wave device coupled with the temperature field; as attached figure 2 Shown is a single-finger structure of a surface acoustic wave filter, including a metal electrode, a piezoelectric substrate...
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