Resistance-type flexible three-dimensional force sensor based on spring-shaped sensing unit
A sensitive unit, spring-like technology, applied in the field of resistive flexible three-dimensional force sensors, can solve the problems of affecting the force-sensitive characteristics of the sensitive unit, weakening the elasticity, etc., and achieve the effect of simple arrangement, good flexibility, and error reduction.
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[0030] The specific embodiment of the present invention will be further described below in conjunction with accompanying drawing and specific embodiment:
[0031] Such as figure 1 As shown, a resistive flexible three-dimensional force sensor based on a spring-shaped sensitive unit is composed of a lower electrode plate layer, a sensitive unit layer, an upper electrode plate layer, and a raised surface layer 7 from bottom to top.
[0032] Among them, such as figure 2 As shown in (a), the lower electrode plate layer includes the lower flexible substrate 1 and the lower electrode plate 2 from bottom to top, as figure 2 Shown in (b), the upper electrode plate layer includes an upper electrode plate 4 and an upper flexible substrate 5 from bottom to top; as figure 2 As shown in (c), it reflects the distribution of the upper and lower electrode plates of the resistive flexible three-dimensional force sensor; the upper electrode plate 5 and the lower electrode plate 2 have the s...
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Abstract
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