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Tunable integrated photo-production microwave source chip and system based on lithium niobate film

A photo-generated microwave, lithium niobate technology, applied in optics, nonlinear optics, instruments, etc., can solve the problems of complex structure and large volume, and achieve the effect of volume reduction, miniaturization, and engineering.

Pending Publication Date: 2022-03-01
TIANJIN JINHANG INST OF TECH PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing photo-generated microwave source system uses more discrete components, which has the characteristics of complex structure and large volume

Method used

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  • Tunable integrated photo-production microwave source chip and system based on lithium niobate film
  • Tunable integrated photo-production microwave source chip and system based on lithium niobate film
  • Tunable integrated photo-production microwave source chip and system based on lithium niobate film

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Experimental program
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Effect test

Embodiment 1

[0026] Please refer to Figure 1 to Figure 3 , this embodiment provides a tunable integrated photo-generated microwave source chip based on a lithium niobate thin film, including a base wafer 1, a lower cladding layer 2, a lithium niobate thin film 3, and an upper cladding layer 5 that are sequentially stacked from bottom to top; Wherein the base wafer 1 is a surface-polished silicon wafer, the upper cladding layer 5 and the lower cladding layer 2 are silicon dioxide layers respectively; the thickness of the lithium niobate thin film 3 is 300-1000 nm.

[0027] The lithium niobate thin film 3 is provided with a lithium niobate optical waveguide 4, that is, the lithium niobate optical waveguide 4 is fabricated in the lithium niobate thin film 3, and is fabricated by a dry etching process; image 3 As shown, the lithium niobate optical waveguide 4 includes a mode spot conversion waveguide 4-1, a first straight waveguide 4-2, a first curved waveguide 4-3, a second straight wavegui...

Embodiment 2

[0035] This embodiment provides a tunable integrated photo-generated microwave source chip based on lithium niobate thin film. structure, and in this embodiment, the optical microcavity waveguide 4-7 adopts a microdisk structure, such as Figure 4 shown.

Embodiment 3

[0037] Please refer to Figure 5 , the present embodiment provides a tunable integrated photo-generated microwave source system based on lithium niobate thin film, the system includes the tunable integrated photo-generated microwave source chip based on lithium niobate thin film as described in embodiment 1, and also includes an electrical amplifier 11 , a radio frequency coupler 12 and a light source 13; wherein, the light source 11 is set close to the phase modulator 6, specifically close to the mode speckle conversion waveguide 4-1 of the phase modulator 6; the electrical amplifier 11 It is a GaAs low-noise radio frequency amplifier with a noise figure less than or equal to 2; the radio frequency coupler 12 is a GaAs radio frequency coupler with a coupling coefficient between 15 and 20 dB.

[0038] When the tunable integrated photo-generated microwave source system based on lithium niobate thin film provided in the embodiment of the present application is in use, the light em...

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Abstract

The invention provides a tunable integrated photo-production microwave source chip and system based on a lithium niobate film. The chip comprises a substrate wafer, a lower cladding, the lithium niobate film and an upper cladding which are sequentially stacked from bottom to top; a lithium niobate optical waveguide is arranged on the lithium niobate film; the lithium niobate optical waveguide comprises a spot-size conversion waveguide, a first straight waveguide, a first bent waveguide, a second straight waveguide, a second bent waveguide, a third straight waveguide and an optical microcavity waveguide which are connected in sequence; a first metal electrode is arranged on the upper cladding at a position corresponding to the first straight waveguide; the first metal electrode, the spot-size conversion waveguide and the first straight waveguide jointly form a phase modulator; a second metal electrode is arranged at a position, corresponding to the optical microcavity waveguide, on the upper cladding; the second metal electrode, the third straight waveguide and the optical microcavity waveguide jointly form a high-Q microresonator; and the lithium niobate film is also provided with a detector connected with the output end of the high-Q micro-resonator. According to the invention, miniaturization and engineering of the photo-generated microwave source can be realized.

Description

technical field [0001] The present application relates to the technical field of optically-generated microwaves, in particular to a tunable integrated optically-generated microwave source chip and system based on lithium niobate thin film. Background technique [0002] Optically generated microwave technology is an optical technology that carries microwave and millimeter wave signals in optical signals and realizes the transmission of radio frequency signals in optical transmission media such as optical fibers. , conversion and modulation. Optical-generated microwave technology utilizes the advantages of low optical signal transmission loss, long transmission distance, and anti-interference in optical fiber communication, and at the same time overcomes the shortcomings of traditional electrical methods such as low frequency upper limit and large signal noise of microwave and millimeter waves, and integrates microwave and optical fiber communication. It has become a research...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04B10/27G02F1/035
CPCH04B10/27G02F1/035
Inventor 张云霄孙文宝
Owner TIANJIN JINHANG INST OF TECH PHYSICS
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