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LED crystal grain appearance detection method

A technology of appearance inspection and grain, applied in sorting and other directions, can solve the problems of abnormal grains not being picked, easy to miss and pick by mistake, and abnormal quality, saving manpower and microscope costs, and realizing multiple reviews. and, the effect of improving accuracy

Active Publication Date: 2022-03-04
FOSHAN NATIONSTAR SEMICON
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AI Technical Summary

Problems solved by technology

[0003] Since the AOI detection ability cannot be 100%, a small part of abnormal grains will be selected on the square sheet, so it needs to be re-inspected manually through a microscope. This method consumes a lot of manpower and microscope equipment, which is to remove 1 % of unqualified grains, but need to check 100% of finished grains, equivalent to 99% of the time is useless work, which greatly affects efficiency and labor costs
[0004] In addition, due to the limited field of view of the microscope, it is easy to miss and pick by mistake in the way of manual microscope picking, resulting in abnormal crystal grains not being picked out, resulting in abnormal quality

Method used

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  • LED crystal grain appearance detection method
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Embodiment Construction

[0037] In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0038] A method for detecting the appearance of LED crystal grains provided by the application comprises the following steps:

[0039] S1, carry out optical inspection to LED grain, obtain appearance parameter document, described appearance parameter document comprises grain defect area ratio;

[0040] Optical inspection is an appearance inspection method of LED grains to judge whether the appearance of LED grains meets the requirements, and the detection standards are set according to the application fields of LED grains and customer requirements.

[0041] Preferably, in the present application, the LED crystal grains are placed in an appearance automatic optical inspection device for optical inspection.

[0042] The appearance parameter document also includes...

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Abstract

The invention discloses an LED (light-emitting diode) crystal grain appearance detection method, which comprises the following steps of: performing optical detection on an LED crystal grain to obtain an appearance parameter document; dividing the LED crystal grains into first qualified crystal grains, first unqualified crystal grains and suspicious crystal grains according to the appearance parameter document; obtaining a picture of a suspicious crystal grain, and judging the appearance defect type of the suspicious crystal grain according to the picture of the suspicious crystal grain; and dividing the suspicious crystal grains into second qualified crystal grains and second unqualified crystal grains according to the types of the appearance defects. According to the detection method, re-judgment is carried out in the wafer stage, the unqualified crystal grains can be picked out in time, the situation that the unqualified crystal grains are sorted and arranged on the finished square pieces is avoided, the step of manual visual inspection is omitted, and then a large amount of manpower and microscope cost are saved.

Description

technical field [0001] The invention relates to the technical field of light-emitting diodes, in particular to a method for detecting the appearance of LED grains. Background technique [0002] After the LED wafer completes electrical parameter testing, appearance automatic optical inspection (Automated Optical Inspection, AOI), and wafer good product sorting, the same grade of die on the LED wafer is selected on the square wafer, and finally the finished square die needs to be checked. Manual visual re-inspection is performed on the appearance of the AOI inspection, and the abnormal grains missed by the AOI inspection are removed to ensure that the appearance of each grain meets the quality requirements for shipment. [0003] Since the AOI detection ability cannot be 100%, a small part of abnormal grains will be selected on the square sheet, so it needs to be re-inspected manually through a microscope. This method consumes a lot of manpower and microscope equipment, which i...

Claims

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Application Information

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IPC IPC(8): B07C5/342B07C5/02B07C5/36
CPCB07C5/3422B07C5/3425B07C5/02B07C5/361B07C5/362Y02P90/30
Inventor 黎银英陈桂飞岑崇江
Owner FOSHAN NATIONSTAR SEMICON
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