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Micro-region magnetization device and method based on MEMS (Micro Electro Mechanical System) micro coil

A magnetization device and micro-region technology, applied in the field of magnetization, can solve the problems of inability to manufacture micro-coils with complex sizes and shapes, achieve the effects of improving production efficiency, realizing multi-level magnetization, and reducing difficulty

Pending Publication Date: 2022-03-04
INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the present invention provides a micro-area magnetization device and method based on MEMS micro-coils. The magnetization device or magnetization method can realize the preparation of micro-coils with small size and complex shape, and then realize the micro-coils of magnets or permanent magnet films. Regional magnetization solves the problem of the inability to prepare micro-coils with small size and complex shape in the prior art, and provides the possibility for the miniaturization of electronic devices such as electromagnetic sensors and actuators

Method used

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  • Micro-region magnetization device and method based on MEMS (Micro Electro Mechanical System) micro coil
  • Micro-region magnetization device and method based on MEMS (Micro Electro Mechanical System) micro coil
  • Micro-region magnetization device and method based on MEMS (Micro Electro Mechanical System) micro coil

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Embodiment 1

[0034] a kind of like figure 1 The micro-region magnetization device of the MEMS micro-coil shown includes: a pulse power supply 1 , a micro-coil 2 , a substrate 3 and a permanent magnetic film 4 . The voltage and pulse width of the pulse power supply 1 are adjustable. In this embodiment, the voltage of the pulse power supply 1 can be adjusted from 0 to 6000V, and the pulse width is less than 500ns. The two electrodes of the pulse power supply 1 are connected to the two electrodes of the microcoil 2 respectively connected; the fine coil 2 is a multi-turn coil, which is connected end to end, and electrodes are arranged at the end to end connection, such as figure 2 As shown, the microcoils 2 in this embodiment are distributed on the upper and lower surfaces of the substrate 3, and the microcoils 2 on the upper and lower surfaces are connected through the through hole 5 opened in the center of the substrate, and the microcoils 2 and one of the electrodes are also connected thro...

Embodiment 2

[0039] Such as image 3 As shown, the micro-area magnetization device of the MEMS micro-coil in this embodiment has the same structure as that of the device in Example 1, and both include a pulse power supply 1, a micro-coil 2, a substrate 3 and a permanent magnetic film 4, and the difference is that Figure 4 As shown, the micro-coil 2 in this embodiment is a single-turn coil, and its pattern is different from that in Embodiment 1. The micro-coil is only distributed on the upper surface of the substrate 3, and there is no need to open holes on the substrate 3. Lead coils or electrodes.

[0040] In this embodiment, due to the special design of the micro-coil 2 pattern, according to the winding direction of the coil, multi-pole magnetization of the magnetized area can be realized. The magnetized micro-area is rectangular, and the magnetization direction can also be changed by adjusting the positive and negative poles of the power supply.

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Abstract

The invention discloses a micro-region magnetization device and method based on an MEMS (Micro Electro Mechanical System) micro coil. The device comprises a pulse power supply, the micro coil, a substrate and a permanent magnet film, the method comprises the following steps: firstly, preparing a fine coil by using a micro-nano processing technology, then preparing a permanent magnet film, attaching the permanent magnet film to a substrate of the fine coil, and connecting a pulse power supply to the fine coil to realize magnetization of a permanent magnet. The micro-fine coil for magnet magnetization is prepared based on the MEMS technology, the micro-fine coil manufacturing technology can reduce the feature size of a magnetized area and the difficulty of complex coil pattern manufacturing, micro-area magnetization of the permanent magnet is achieved through the MEMS micro-fine coil with the small size and the shape capable of being adjusted at will, and the micro-fine coil has the advantages of being small in size, small in size and high in practicability. The problem that in the prior art, a micro coil with the small size and the complex shape cannot be prepared is solved, and miniaturization of electronic devices such as an electromagnetic sensor and an actuator is made possible.

Description

technical field [0001] The invention belongs to the field of magnetization technology, in particular to a micro-region magnetization device and method based on MEMS micro-coils. Background technique [0002] In recent years, with the rise of new technologies, the miniaturization of electronic devices such as electromagnetic sensors and actuators is an inevitable trend of technology and industrial development. The production of miniaturized permanent magnets is the premise of realizing the miniaturization of electromagnetic devices. The preparation size is smaller, The microcoils required for the magnetization of magnets with more complex shapes are the key to making miniaturized permanent magnets, so the preparation of microcoils is the first step in realizing the magnetization of micro-regions of permanent magnetic materials. However, limited by the existing process conditions, currently only micro-coils with a size of more than 500 μm and a single pattern can be produced, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01F13/00H01F41/04
CPCH01F13/003H01F41/04
Inventor 谢晋支钞屈明山李严军王颉张慧刘鑫陶宏
Owner INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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