Heat treatment method of molybdenum-niobium alloy rolling target material

A heat treatment method and molybdenum-niobium alloy technology, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of affecting yield, complicated sheath protection, high cost, etc., and achieves the improvement of production efficiency and the elimination of Effects of material defects and energy reduction

Pending Publication Date: 2022-03-08
ZHUZHOU HARD ALLOY GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The vacuum annealing method is from vacuuming the vacuum furnace → heating → heat preservation → cooling, a set of workflow goes down, at least 24 hours, time-

Method used

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  • Heat treatment method of molybdenum-niobium alloy rolling target material
  • Heat treatment method of molybdenum-niobium alloy rolling target material
  • Heat treatment method of molybdenum-niobium alloy rolling target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Vacuum sintered molybdenum-niobium 5 (5% Nb content) slab was hot-rolled 4 times to 7mm and leveled; ultrasonic flaw detection was performed first, then it was annealed in a hydrogen furnace at 1300°C for 2 hours, ground After the light is taken, samples are taken for hydrogen content testing, followed by flaw detection and metallographic and grain size testing.

[0018] Performance Testing:

[0019] (1) Hydrogen content

[0020] The hydrogen annealing in this embodiment and the vacuum annealing in the current process were sampled and analyzed separately, and the hydrogen content measured in multiple samples was between 5-30 ppm, and the average value was about 16 ppm.

[0021] (2) Metallographic and grain size

[0022] In order to verify the grain structure of the plate after hydrogen annealing in this example, samples were taken at the front, middle, and rear points respectively, and two samples were taken at each point, the longitudinal section and the transverse s...

Embodiment 2

[0026] Vacuum sintered molybdenum-niobium 5 (5% Nb content) slab was hot-rolled 5 times to 7mm and leveled; ultrasonic flaw detection was performed first, and then it was annealed in a hydrogen furnace at 1400°C for 2 hours, ground After the light is taken, samples are taken for hydrogen content testing, followed by flaw detection and metallographic and grain size testing.

[0027] It is measured that the average hydrogen content of the molybdenum-niobium alloy plate in this embodiment is 15ppm, the total number of flaws in the flaw detection results is 0, and the grain size grade is 2000 / mm 2 , can be seen in detail Figure 5 ; The annealing method of the present invention can realize zero defect.

Embodiment 3

[0029] Hot isostatically pressed molybdenum-niobium 10 (10% Nb content) slabs with a thickness of 67mm were hot-rolled six times to 14mm and leveled; then they were annealed in a hydrogen furnace at 1500°C for 2 hours, and polished Samples were taken for hydrogen content testing, followed by flaw detection and metallographic and grain size testing.

[0030] It is measured that the average hydrogen content of the molybdenum-niobium alloy plate in this example is 18ppm, the total number of flaws in the flaw detection results is 4, and the grain size grade is 8000 / mm 2 .

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Abstract

The invention discloses a heat treatment method of a molybdenum-niobium alloy rolling target material, which comprises the following steps: directly carrying out recrystallization annealing on the rolled molybdenum-niobium alloy target material in a hot rolling heating furnace, then polishing the molybdenum-niobium alloy target material, and removing the surface layer to obtain a molybdenum-niobium alloy subjected to heat treatment. The heat treatment mode is a rapid and efficient annealing mode, after hot rolling is finished, the appropriate annealing temperature and heat preservation time are selected according to the component content of a plate blank, the grain size and density before rolling, the total rolling compression ratio and other factors, a hot rolling heating furnace is adjusted to the temperature selected for annealing, and the rolled molybdenum-niobium plate is directly placed in the hot rolling furnace to be annealed. And compared with vacuum annealing, the production efficiency of annealing can be improved by 10 times, and energy consumption and other cost are greatly reduced. According to the annealing mode provided by the invention, a grain structure which is uniformly distributed and isotropic can be obtained; and the grain size of the product can be well controlled according to the requirements of the finished product.

Description

technical field [0001] The invention belongs to the field of high-temperature refractory metal targets, and in particular relates to a heat treatment method for molybdenum-niobium alloy rolling targets. Background technique [0002] After the molybdenum-niobium alloy is rolled into a plate, its grain structure has a certain distribution direction. This directional arrangement destroys the isotropy required by the sputtering target; at the same time, the rolled plate is internally A large number of tiny defects are formed, which need to be repaired during recrystallization; therefore, molybdenum-niobium rolled plates used as sputtering targets must be recrystallized annealed. [0003] Because niobium easily absorbs hydrogen and becomes brittle, it is generally considered that this annealing process should not be carried out in a hydrogen furnace. There are two common practices in the industry: one is to carry out in a vacuum furnace, and the other is to protect it with a she...

Claims

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Application Information

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IPC IPC(8): C23C14/34C22F1/18C23C14/14
CPCC23C14/3414C22F1/18C23C14/14
Inventor 杨吉李石林易晓明
Owner ZHUZHOU HARD ALLOY GRP CO LTD
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