Feeding device with clean vacuum environment

Abstract

The invention discloses a clean vacuum environment feeding device which comprises a feeding tank (3), the feeding volume of the feeding tank (3) is larger than or equal to that of a furnace body (1) to be fed, the feeding tank (3) is provided with a feeding port in butt joint with a feeding port of the furnace body (1) to be fed, the feeding tank (3) is detachably connected with the furnace body (1) to be fed, and the feeding port of the furnace body (1) to be fed is in butt joint with the feeding port of the furnace body (1) to be fed. A feeding port is formed in the feeding tank (3), a feeding isolation valve (31) is arranged at the feeding port, a feeding isolation valve (11) is arranged at the feeding port of the to-be-fed furnace body (1), the feeding tank (3) and the to-be-fed furnace body (1) are each provided with a vacuum connector and a gas replacement connector, and the vacuum connectors and the gas replacement connectors are each provided with a purification isolation valve. According to the feeding device for the clean vacuum environment, unified feeding can be conducted, the needed feeding amount and unified purification can be completed at a time, the purification space is small, the purification time is saved, and automation is achieved.

Description

technical field [0001] The invention relates to the technical field of feeding equipment, in particular to a feeding device in a clean vacuum environment. Background technique [0002] The existing charging device includes the steps of adding a barrel of material to the furnace body to be charged: charging, purifying, feeding, and pulling out. Purification means that many raw materials need to exist in an environment that is isolated from certain gases, such as an oxygen-free environment, or a vacuum environment. The purification process often requires vacuuming and switching with inert gases. An isolating valve is provided at the feed port at the upper end of the furnace body to be fed. The isolating valve can isolate the two cavities in the closed state, and can connect the two cavities in the open state. Different chambers have different pressures and atmospheres due to different processes. When necessary, they are sometimes connected, and sometimes they are not connect...

AI Technical Summary

Problems solved by technology

[0004] Due to production needs, the upper chamber cannot be made too large, and the feeding cylinder cannot be made too large in the upper chamber. The amount of feeding will not be large each time, but the total amount of feeding needs to be large, so the above feeding process needs to be repeated many times. Many steps and time-consuming

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