Axial air-cooled multi-mode cylindrical resonant cavity MPCVD device

A technology of resonant cavity and axial wind, which is applied in the direction of gaseous chemical plating, coating, electrical components, etc., can solve the problem that the cylindrical resonant cavity MPCVD device cannot adapt to high power growth, etc., and achieve more convenient improvement, convenient use, and structure simple effect

Pending Publication Date: 2022-03-18
成都稳正科技有限公司
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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide an axial air-cooled multi-mode cylindrical resonator MPCVD

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  • Axial air-cooled multi-mode cylindrical resonant cavity MPCVD device
  • Axial air-cooled multi-mode cylindrical resonant cavity MPCVD device
  • Axial air-cooled multi-mode cylindrical resonant cavity MPCVD device

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Embodiment Construction

[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0029] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying...

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Abstract

The invention discloses an axial air-cooled multi-mode cylindrical resonant cavity MPCVD device. The technical problem that the structure of an existing cylindrical resonant cavity MPCVD device cannot adapt to high-power growth is solved. The device comprises a microwave generating device and a resonant cavity connected with the microwave generating device, a stainless steel water-cooling antenna connected with the microwave generating device and an annular quartz window connected with the stainless steel water-cooling antenna are arranged in the resonant cavity, a heat dissipation mechanism and an exhaust mechanism which are communicated with the resonant cavity are arranged at the top and the bottom of the resonant cavity respectively, a lifting mechanism is arranged at the bottom of the exhaust mechanism, and a growth base station is arranged at the top of the lifting mechanism. The annular quartz window is adopted to replace a traditional flat quartz window, the annular middle position of the annular quartz window is replaced by the stainless steel water-cooled antenna, direct bombardment of plasma and existence of a secondary strong field region in a cavity are avoided, long-term stable operation of equipment is better facilitated, and the annular quartz window can adapt to input of high cavity pressure and high power.

Description

technical field [0001] The invention belongs to the technical field of diamond synthesis equipment, and in particular relates to an axial air-cooled multi-mode cylindrical resonant cavity MPCVD device. Background technique [0002] Microwave plasma chemical vapor deposition (MPCVD) is the method of choice for preparing high-quality diamond, because compared with other methods of plasma generation, microwave-excited plasma has no electrode material contamination, good controllability, and high plasma density. A series of advanced advantages. The core component of the MPCVD device is the resonant cavity used to generate microwave plasma. The structure of the resonant cavity directly affects the distribution and excitation degree of the plasma in the MPCVD device, and the microwave dielectric window is the channel for transmitting microwaves and isolating the atmosphere barrier. Its installation The position and structure directly affect the vacuum sealing performance and the ...

Claims

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Application Information

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IPC IPC(8): H01J37/32C23C16/27C23C16/511
CPCH01J37/32192H01J37/3222H01J37/32238H01J37/32431C23C16/274C23C16/511H01J2237/3321
Inventor 袁稳袁良郑华
Owner 成都稳正科技有限公司
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