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Polymer template surface treatment method

A polymer template and surface treatment technology, applied in the field of nanoimprinting, can solve the problems of waste of resources, increased wetting performance of the template surface, peeling off, etc., and achieve the effect of avoiding waste of resources

Pending Publication Date: 2022-03-25
GOERTEK INC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] During the embossing process, the anti-adhesive layer wears out with the increase in the number of uses, and the wear of the anti-adhesive layer makes the wetting performance of the template surface gradually increase. When the wetting performance increases to a certain level, the photoresist cannot be guaranteed It can be effectively peeled off from the surface of the template. The current treatment method is to discard the polymer template, resulting in waste of resources

Method used

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  • Polymer template surface treatment method

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Embodiment Construction

[0028] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present application unless specifically stated otherwise.

[0029] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way serves as any limitation of the application, its application or uses.

[0030] Techniques and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques and devices should be considered part of the description.

[0031] In all examples shown and discussed herein, any specific values ​​should be construed as exemplary only, and not as limitations. Therefore, other instances of the exemplary embodiment may have diffe...

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Abstract

The invention discloses a polymer template surface treatment method. The polymer template surface treatment method comprises the following steps: providing a polymer template, wherein the surface of the polymer template is provided with a wear-resistant anti-sticking layer; the abraded anti-sticking layer is treated to form a substrate surface, and the water drop angle of the surface of the substrate surface ranges from 0 degree to 50 degrees; the method comprises the following steps: coating a film layer on the surface of a polymer template to form the substrate surface, and covering a worn anti-sticking layer with the film layer; or removing the abraded anti-sticking layer by adopting a corrosive solution so as to expose the substrate surface; and re-coating the anti-sticking layer on the substrate surface of the polymer template.

Description

technical field [0001] The present application relates to the technical field of nanoimprinting, and more specifically, the present application relates to a method for treating the surface of a polymer template. Background technique [0002] The key processes of nanoimprinting technology include: template manufacturing, imprinting process (including template processing, pressurization, demoulding process) and pattern transfer process. [0003] In stencil manufacturing, patterns are created using photolithographic techniques. For large-scale graphics, DUV and EUV technologies in semiconductor processes can be used; for graphics with small line widths, electron beam lithography technology is required. The precision of electron beam lithography can reach 10nm or even below. After the pattern is generated, processes such as depositing metal, stripping, and reactive ion etching are required, and finally the generated pattern is transferred to the substrate. Generally speaking,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00
CPCG03F7/0002
Inventor 黄苾荍韩兴君张文强董立超杨海涛吾晓饶轶
Owner GOERTEK INC
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