Electrical impedance tomography sensor suitable for microchannel foreign substance detection

Abstract

The invention discloses an electrical impedance tomography sensor suitable for micro-channel foreign substance detection, which comprises an upper glass chip, a micro-channel carrier silicon wafer, a lower glass chip and a fluid pipeline joint, and the upper glass chip and the lower glass chip are symmetrically bonded and connected to the upper side and the lower side of the micro-channel carrier silicon wafer; a strip-shaped hole is formed in the micro-channel carrier silicon wafer, and the micro-channel carrier silicon wafer is attached to the upper-layer glass chip and the lower-layer glass chip to form a micro-channel; a plurality of upper-layer electrodes are arranged on the inner side surface of the upper-layer glass chip, a plurality of lower-layer electrodes are arranged on the inner side surface of the lower-layer glass chip, and the upper-layer electrodes and the lower-layer electrodes form a double-layer electrode array structure; and two fluid pipeline joints, namely a liquid inlet joint and a liquid outlet joint, are mounted on the upper-layer glass chip. Based on the electrical impedance tomography technology, a miniature double-layer electrode array structure is designed, a glass-silicon wafer-glass structure is adopted for machining, and the problem that it is difficult to achieve microchannel foreign matter detection through EIT under the microscale is solved.

Description

technical field [0001] The invention relates to the technical field of detection of foreign matter in a microchannel, in particular to an electrical impedance tomography sensor suitable for detecting foreign matter in a microchannel. Background technique [0002] Many industrial processes and medical fields involve the detection of heterogeneous substances in small channels or tiny channels, such as the detection of microplastic particles in environmental water, the detection of small cell clusters or even single cells in microchannels, etc. Among them, the detection of small cell clusters and single cells in tiny channels has a wide range of demands in advanced testing instruments such as flow cytometry. [0003] Liquid (such as blood) biopsy technology has the advantages of complete molecular information, less invasiveness, convenient sampling and low cost, and has become a research hotspot in minimally invasive detection methods in vitro in recent years. Flow cytometry b...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide an electrical impedance tomography sensor suitable for detection of foreign substances in microchannels. Based on electrical impedance tomography (EIT) technology, a miniature double-layer electrode array structure is designed, using glass-silicon Sheet-glass structure is processed and realized, which solves the problem of difficult realization of micro-channel heterogeneous substance detection by EIT at a micro scale

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