Defect detection device for semiconductor chip
A defect detection, semiconductor technology, applied in measurement devices, optical testing of flaws/defects, material analysis by optical means, etc., can solve problems such as reduced production efficiency, and achieve the effect of improving efficiency
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[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0029] In one embodiment, see Figure 1-7 , a defect detection device for a semiconductor chip, comprising a base plate 1, a first support plate 2 is provided on the left and right sides of the base plate 1, and the end of the first support plate 2 is connected to a transfer roller 3 in rotation, and a conveyor belt is provided outside the transfer roller 3 37. The first support plate 2 is provided with a first driving motor 6, the output shaft of the first dr...
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