Viscous adsorption method of test probe cleaning method

A technology for testing probes and cleaning, applied in cleaning methods and utensils, cleaning methods using tools, chemical instruments and methods, etc. The effect of ensuring the test yield

Active Publication Date: 2022-04-29
FTDEVICE TECH (SUZHOU) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] In order to overcome the above-mentioned deficiencies in the prior art, the present invention provides a test probe cleaning method to solve the existing problems of how to effectively replace manual cleaning and how to Thorough cleaning of probes

Method used

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  • Viscous adsorption method of test probe cleaning method
  • Viscous adsorption method of test probe cleaning method
  • Viscous adsorption method of test probe cleaning method

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0053] The following is a specific implementation of a test probe cleaning device of the present invention.

[0054] The test probe cleaning device under the present embodiment, such as Figure 1-9As shown, the test probe cleaning device includes a cleaning component 1, a clamping component 2, a test socket 3, a test base 4 and a test probe 5; the clamping component 2 is arranged above the cleaning component 1, and the cleaning component 1 is provided with a test socket 3 below, and the test socket 3 is installed on the test base 4. The clamping member 2 can control the cleaning member 1 above the test socket 3 through the movement of the transmission mechanical arm, and the cleaning member 1 can be moved to In the test socket 3, and fit against the probe of the test probe 5 in the test socket 3, to complete the work of scraping off the accumulated impurities on the test probe 5 first, and then absorbing and removing the impurities and dust from the test socket 3 , that is, t...

specific Embodiment approach 2

[0067] The following is a specific implementation of a test base of a test probe cleaning device of the present invention.

[0068] It should be noted that the test base of a test probe cleaning device in this embodiment can be implemented separately, that is, it can exist independently as a part of a test probe cleaning device, or it can be described in Embodiment 1. A test probe cleaning device is further defined.

[0069] The test base of the test probe cleaning device under the present embodiment, such as figure 1 , 2 , 7, 8, the test base of the probe cleaning device includes a base body 4-1, a first limiting clip 4-3, a second limiting clip 4-4, a first lead screw nut 4 -5. The second lead screw nut 4-6, the first adjusting bolt 4-7, and the second adjusting bolt 4-8; the side wall of the base body 4-1 is symmetrically opened with two groups of strip-shaped through holes, the first The limit clip 4-3 and the second limit clip 4-4 are movably arranged in two groups of ...

specific Embodiment approach 3

[0073] The following is a specific implementation of a clamping member of a test probe cleaning device of the present invention.

[0074] It should be noted that the clamping member of a test probe cleaning device in this embodiment can be implemented separately, that is, it can exist independently as a part of a test probe cleaning device, or it can be described in Embodiment 1. A test probe cleaning device is further defined.

[0075] The clamping member of the test probe cleaning device under the present embodiment, such as figure 1 , 2 , 9, the clamping member of the probe cleaning device includes a clamping body 2-1, an air pipeline 2-3, and a sealing plate 2-4; the lower part of the inner cavity of the clamping body 2-1 is provided with an adsorption port 2-2, there is an air pipeline 2-3 inside the clamping body 2-1, the suction end of the air pipeline 2-3 reaches the suction port 2-2, and the clamping body 2-1 can pass through the air pipeline The adsorption port 2-...

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Abstract

The invention discloses a viscous adsorption method of a test probe cleaning method, and relates to the technical field of semiconductors. Specifically, a transmission motor is started to rotate clockwise, a driving trapezoidal gear is driven to rotate clockwise, the driving trapezoidal gear drives a threaded sleeve to rotate anticlockwise, a transmission shaft is driven to move downwards, and cleaning soft rubber is driven to move downwards through a fixing piece to abut against the upper end face of a test probe. The contact action of the cleaning soft rubber and the plum-blossom-shaped probe part of the test probe is deformed through contact, abutting and rolling, impurities and dust on the upper end face of the plum-blossom-shaped probe are adhered to the surface of the cleaning soft rubber, the transmission motor is adjusted to rotate anticlockwise, and the previous action is completed in the reverse direction. The cleaning flexible glue moves upwards to be separated from the upper end face of the test probe so as to complete viscous adsorption cleaning work; according to the test probe cleaning method, manual cleaning can be effectively replaced, and the cleaning quality and the test efficiency are guaranteed.

Description

[0001] This application is a divisional application of the invention patent application "Method for Cleaning Test Probe and Friction Scraping, Adhesive Adsorption and Probe Fixing Method". [0002] The filing date of the original case: 2020-11-28. [0003] Original application number: 2020113656141. [0004] Title of the original invention: Test probe cleaning method and friction scraping, viscous adsorption and probe fixing methods. technical field [0005] The viscous adsorption method of the test probe cleaning method of the present invention relates to the technical field of semiconductors. Background technique [0006] The last process of semiconductor manufacturing is testing. The testing process can be divided into preliminary testing and final testing. Its main purpose is not only to find defects in semiconductor components, but also to classify semiconductor components according to specifications. In the process of testing a semiconductor component such as a chip,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/073G01R1/067B08B1/00B08B13/00
CPCB08B13/00G01R1/073G01R1/067B08B1/165Y02E10/50
Inventor 贺涛金永斌丁宁朱伟
Owner FTDEVICE TECH (SUZHOU) CO LTD
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