Gas distribution system and gas distribution method

A gas distribution and gas technology, which is used in chemical instruments and methods, gas and gas/vapor mixing, mixers, etc., can solve the problems of long-time flushing of the detection chamber, affecting the test speed and accuracy, etc., to improve the dilution ratio, The effect of shortening the gas distribution time and improving the control accuracy

Active Publication Date: 2022-05-06
SUZHOU UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It solves the problem in the prior art that when it is necessary to switch between different concentrations of standard gas or mixed gas during the instrument test, it takes a long time to flush the detection chamber, which affects the test speed and accuracy

Method used

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  • Gas distribution system and gas distribution method
  • Gas distribution system and gas distribution method

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Embodiment 1

[0049] Such as figure 1 As shown, the embodiment of this specification provides a gas distribution system, including a gas distribution assembly 1, a test chamber 2 and a vacuum pump. The gas distribution assembly 1 includes a background gas cylinder 12, a mixing chamber 13 and at least one target gas cylinder 11. The target gas The bottle 11 communicates with the mixing chamber 13 through the corresponding target gas path 14, and the background gas cylinder 12 communicates with the mixing chamber 13 through the background gas path 15. The target gas path 14 is provided with a first valve 16, and the background gas path 15 is provided with a second valve. Two valves 17, one end of the test chamber 2 communicates with the mixing chamber 13 through the ventilation pipeline 4, the ventilation pipeline 4 is provided with a third valve 5, the other end of the testing chamber 2 is connected to a vacuum pump, and the vacuum pump is used to evacuate the mixing chamber 13, The mixing c...

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Abstract

The invention relates to a gas distribution system and a gas distribution method.The gas distribution system comprises a gas distribution assembly, a testing cavity and a vacuum pump, the gas distribution assembly comprises a background gas cylinder, a mixing cavity and at least one target gas cylinder, and the target gas cylinder communicates with the mixing cavity through a corresponding target gas path; the background gas cylinder is communicated with the mixing cavity through a background gas path, a first valve is arranged on the target gas path, a second valve is arranged on the background gas path, one end of the test cavity is communicated with the mixing cavity through a gas exchange pipeline, a third valve is arranged on the gas exchange pipeline, and the other end of the test cavity is connected with the vacuum pump. The vacuum pump is used for vacuumizing the mixing cavity, a first barometer is arranged in the mixing cavity, and the first barometer is used for monitoring the gas pressure in the mixing cavity. By adopting partial pressure control, the control precision of the concentration of each component of the mixed gas can be improved, the gas dilution ratio is improved, the gas distribution time is shortened, and the trace multi-component mixed gas is prepared.

Description

technical field [0001] The invention relates to the technical field of gas distribution, in particular to a gas distribution system and a gas distribution method. Background technique [0002] In the process of industrial production, especially in the production of chemicals and chemical tests, it is often necessary to prepare a variety of mixed gases, some of which are for the purpose of diluting the gas, such as adding N2 to SF6 gas and diluting it to form a mixed gas containing SF6 gas , or mix SF6 gas with N2, CO, SO2, H2S and other gases to obtain a mixed gas containing various components, which is used for chemical tests or for making gas analyzers, purity meters, and combustible gas detection alarms , Gas leak detectors, various gas sensors, etc. The standard gas for verification, detection and calibration and performance evaluation. [0003] In the field of gas analysis instruments, when calibrating or calibrating the instrument, different concentrations of gases ar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01F33/70B01F23/10
Inventor 赵蒙高炬
Owner SUZHOU UNIV OF SCI & TECH
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