High-performance polarizer based on sub-wavelength grating structure
A sub-wavelength grating and polarizer technology, applied in the direction of optical waveguide light guide, instrument, optics, etc., can solve the problems of limited working bandwidth, limited performance, large loss, etc., achieve high integration density, reduce process steps, refraction The effect of large rate difference
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Embodiment 1
[0026] figure 1 is a schematic diagram of the structure of a high-performance polarizer based on a subwavelength grating structure. The output end of the single-mode input waveguide 1 is connected to the input end of the gradient input structure 2; the output end of the gradient input structure 2 is connected to the input end of the middle vertical sub-wavelength grating structure 3; the upper horizontal sub-wavelength grating structure 4, the lower horizontal sub-wavelength grating structure The wavelength grating structure 5 is respectively located on the upper and lower sides of the middle vertical sub-wavelength grating structure 3; the output end of the middle vertical sub-wavelength grating structure 3 is connected to the input end of the gradient output structure 6; the output end of the gradient output structure 6 is connected to the single-mode The input end of the output waveguide 7 is connected.
[0027] figure 2 is a schematic diagram of the waveguide cross-sect...
Embodiment 2
[0038] The difference between this embodiment and embodiment 1 is that the cover layer is changed to silicon dioxide, so as to reflect the property that the polarizer has optional cover layer materials. The parameters fine-tuned relative to Example 1 and the final performance results are briefly described below.
[0039] figure 2 is a schematic diagram of the waveguide cross-section of a high-performance polarizer based on a subwavelength grating structure. The substrate 11 is silicon, the buried oxide layer 10 is silicon dioxide with a thickness of 2 μm, the waveguide layer 9 is silicon with a thickness of 220 nm, and the capping layer 8 is silicon dioxide in this embodiment. Obviously, for those skilled in the art, other materials can also be used for the covering layer.
[0040] The graded input structure 2 consists of a graded waveguide whose length is 4 μm and whose width linearly decreases from 430 nm to 100 nm, and a subwavelength grating structure whose vertical len...
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