[0038] Example 1:
[0039] Please refer to Figure 1- Figure 3 This embodiment provides a reaction chamber device 100, which includes a reaction chamber housing 110. One end of the reaction chamber housing 110 is provided with an adjusting assembly 120 and the other end is provided with a blocking assembly 140. The adjusting assembly 120 is used to adjust the length of the inner space of the reaction chamber housing 110, and the blocking assembly 140 is detachably connected with the reaction chamber housing 110, so that the rod 200 to be coated can be conveniently placed in the reaction chamber housing 110.
[0040] Specifically, the reaction chamber housing 110 is a cuboid cavity structure formed by connecting four rectangular steel plates. The middle of one steel plate is provided with a rectangular through hole. A rectangular tubular microwave transmission assembly 190 is arranged at the rectangular through hole, and the microwave transmission assembly 190 is connected with the reaction chamber housing 110 through a flange. Since the microwave transmission module 190 can directly adopt the existing structure, it will not be described in detail.
[0041] The adjusting assembly 120 comprises a sleeve 121, an end cap 122, a slider 125 and an inner cylinder 123, wherein the sleeve 121 is a cylindrical structure, one end of which is sleeved and connected to the end of the reaction chamber shell 110, and the other end of which is connected to the end cap 122. To facilitate the connection between the sleeve 121 and the reaction chamber shell 110, the end of the reaction chamber shell 110 is also provided with a circular plate 129, the middle of which is provided with a rectangular hole, and the circular plate 129 is connected with the end of the reaction chamber shell through the rectangular hole. The sleeve 121 is connected to the edge of the circular plate 129. The end cap 122 is a plate-like structure with the same diameter as the circular plate 129.
[0042] The slider 125 includes a slider body 1251 and an end plate 1252 which are integrally formed, wherein the slider body 1251 is cuboid, and the end plate 1252 is a circular plate-like structure arranged at the outer end of the slider body 1251. The slider body 1251 is slidably inserted into the reaction chamber housing 110, and the end plate 1252 is located in the sleeve 121.
[0043] The inner barrel 123 is arranged in the sleeve 121 and coaxially arranged with the sleeve 121; One end of the inner cylinder 123 is hermetically connected with the end of the slider 125, and the other end is hermetically connected with the inner surface of the end cap 122. A sealed space is formed between the inner cylinder 123, the end cap 122 and the sleeve 121, thus preventing the outside air from entering the reaction chamber through the gap between the slider 125 and the inner wall of the reaction chamber housing 110. The inner cylinder 123 is of an axially retractable structure, thus facilitating the sliding of the slider 125.
[0044] Furthermore, the inner cylinder 123 is an axially compressible elastic cylinder, which can provide a certain thrust for the slider 125. Therefore, the slider 125 can press the rod 200 to be coated, which is convenient for fixing the rod 200 to be coated. For example, the inner cylinder 123 can be made of corrugated pipe.
[0045] In order to improve the sealing effect, the adjusting assembly 120 is also provided with an outer cylinder 124. The outer cylinder 124 is coaxially arranged with the sleeve 121, and is located between the sleeve 121 and the inner cylinder 123. One end of the outer cylinder 124 is hermetically connected with the inner surface of the end cap 122, and the other end is hermetically connected with the circular plate 129 at the end of the reaction chamber housing 110.
[0046] The outer cylinder 124 can also facilitate the assembly of the slider body 1251 and the reaction chamber housing 110, specifically, the outer circumferential surface of the end plate 1252 is in sliding fit with the inner wall of the outer cylinder 124; When the slider body 1251 comes out of the reaction chamber housing 110, the outer cylinder 124 can play a guiding role and position the slider 125, thus facilitating the centering of the slider body 1251 with the reaction chamber body and the assembly of the slider body 1251. In order to facilitate the assembly of the slider body, the inner end of the slider body is also provided with a chamfer.
[0047] The outer cylinder 124 can be a bellows or other tubular structure whose inner surface can be slidably fitted with the end plate 1252.
[0048] Please refer to Figure 3- Figure 5 In order to introduce the reaction gas into the vacuum chamber of the reaction chamber device 100, an air inlet assembly 130 is further provided at the adjusting assembly 120. The air inlet assembly 130 includes an air distribution plate 131 and an air inlet pipe 132. The air distribution plate 131 has a circular plate structure and is fixedly connected with the outer end face of the slider 125. The air distribution plate 131 is uniformly provided with a plurality of air holes, and the slider 125 is provided with a plurality of air passages 1253 at corresponding positions; The air holes of the air distribution disk 131 correspond to the air passages 1253 of the slider 125 one by one. The air passage 1253 of the slider 125 extends into the inner cavity of the reaction chamber housing 110 along the length direction of the slider 125, so that the gas from the air holes in the gas distribution plate 131 can enter the inner cavity of the reaction chamber housing 110 through the air passage 1253.
[0049] The inner end of the gas inlet pipe 132 is also provided with a gas distribution cover 133, which is used to evenly distribute the gas in the gas inlet pipe 132 to the air holes on the gas distribution plate 131. Specifically, the gas distribution cover 133 covers the gas distribution plate 131, and a gap is formed between the inner wall of the gas distribution cover 133 and the outer wall of the gas distribution plate 131, thus forming a gas buffer space. A through hole is formed in the middle of the air distribution cover 133, one end of the through hole near the air distribution plate 131 is chamfered, and the other end is communicated with the air inlet pipe 132. Correspondingly, the central part of the gas distribution plate 131 is provided with a tapered convex portion 134, the end of which is located in the through hole in the central part of the gas distribution cover 133, and the tapered surface of the tapered convex portion 134 is spaced from the chamfered inner surface of the through hole.
[0050]The cooperation of the slide block 125, the gas distribution plate 131 and the gas distribution cover 133 enables the reaction gas to uniformly and stably enter the reaction chamber, thus providing necessary conditions for the uniformity of the coating quality of the rod 200 to be coated at different positions. Specifically, when the reaction gas in the gas inlet pipe 132 passes between the through hole of the gas distribution cover 133 and the tapered convex part 134, the gas flow spreads around along the tapered convex part 134; And then enters the air channel of the slider 125 through the air holes on the air distribution plate 131. Because the air passages of the slider 125 are distributed at different positions of the slider 125, the reaction gas from the air passages can directly enter different positions of the reaction chamber, and the reaction gas at different positions of the reaction gas is evenly distributed; Thereby providing necessary conditions for ensuring the coating quality.
[0051] Furthermore, the end face of the slider 125 close to the inside of the reaction chamber is provided with a mounting cylinder 126, which extends along the length direction of the reaction chamber housing 110, one end of which is hermetically connected with the slider 125, and the other end of which is provided with a mounting plate. The outer surface of the mounting plate is provided with a recess for fixing the rod 200 to be coated.
[0052] Due to the continuous discharge in the reaction chamber during the coating process, a large amount of heat is generated; Therefore, it is necessary to lower the temperature inside the reaction chamber. Therefore, a water inlet pipe 127 is also arranged in the mounting cylinder 126, and the water inlet pipe 127 is coaxially arranged with the mounting cylinder 126; A water flow interlayer is formed between the outer circumferential surface of the water inlet pipe 127 and the inner axial surface of the mounting cylinder 126. The slider 125 is also provided with a water inlet channel and a water outlet channel, wherein the water inlet channel is communicated with the water inlet pipe 127, and the water outlet channel is communicated with the water flow interlayer. The outer ends of the water inlet channel and the water outlet channel are respectively provided with cooling water pipes 128, and the two cooling water pipes 128 pass through the mounting holes on the end cover 122; When the slider 125 moves, the two cooling water pipes 128 can slide in the mounting holes.
[0053] Please refer to Figure 3 The plugging assembly 140 is detachably connected with the reaction chamber housing 110. When the plugging assembly 140 is detached from the reaction chamber housing 110, the rod 200 to be coated can be put into or taken out of the reaction chamber housing 110. Specifically, the plugging assembly 140 includes a circular cylinder 143 and a dismounting rod 141. Correspondingly, the end of the reaction chamber housing 110 is provided with a rectangular plate 112 ( Figure 2 ), a through hole is provided in the middle of the rectangular plate 112. The circular cylinder 143 is installed in the through hole of the rectangular plate 112 and connected with the rectangular plate 112 (detachable connection or non-detachable connection); The detachment lever 141 is detachably installed in the circular cylinder. The inner end face of the dismounting rod 141 is provided with a fixing cylinder 142, and the inner end face of the fixing cylinder 142 is provided with a recess for fixing the rod 200 to be coated. The disassembly rod 141 is provided with a cooling structure similar to that of the plug assembly 140, and the cooling structure on the disassembly rod 141 will not be described in detail to avoid redundant description.
[0054] The working principle of the reaction chamber device 100 provided in this embodiment is as follows:
[0055] When the rod 200 to be coated needs to be loaded into the reaction chamber housing 110, the blocking assembly 140 is first removed, and one end of the rod 200 to be coated is mounted on the fixing cylinder 142 at the inner end of the dismounting rod 141; Then, the rod 200 to be coated is loaded into the reaction chamber housing 110, and the end of the rod 200 to be coated abuts against the mounting cylinder 126 on the slider 125; At this time, the rod 200 to be coated can push the slider 125 to move, so that the position of the slider 125 can adapt to the length of the rod 200 to be coated. Since the inner cylinder 123 of the adjusting assembly 120 can exert continuous thrust on the slider 125, when the blocking assembly 140 is connected with the reaction chamber housing 110, the rod 200 to be coated can be reliably fixed in the reaction chamber housing 110. To sum up, after the reaction chamber device 100 is adopted, the longitudinal space inside the chamber can be adaptively adjusted, so that rods 200 with different lengths to be coated can be used.
