Two-dimensional motion platform

A two-dimensional motion platform, motion platform technology, applied in electric components, vibration suppression adjustment, non-rotational vibration suppression, etc., can solve the problem of affecting the positioning accuracy and stable speed of the motion platform, the vibration of the motion platform base, and the decrease in the positioning accuracy of the motion platform. and other problems, to achieve the effects of improving positioning accuracy, smoothing fluctuations, and shortening vibration time.

Pending Publication Date: 2022-05-13
SHENZHEN DEVOL ADVANCED AUTOMATION CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the motor stator of the current two-dimensional motion platform is generally directly fixed on the base of the motion platform with a rigid connection. to the motion platform, causing the motion platform to vibrate, and finally affecting the positioning accuracy and stable speed of the motion platform
Especially when the speed and acceleration of the motion platform continue to increase, the reaction force transmitted by the motor to the base of the motion platform will also increase, and the vibration will become more severe, further reducing the positioning accuracy of the motion platform
[0004] Therefore, the vibration caused by the reaction force of the motor to the base of the motion platform seriously restricts the further speed-up of the motion platform. It is necessary to develop a high-speed and high-acceleration motion platform and must solve the platform vibration caused by the reaction force transmitted by the motor to the base of the motion platform.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] as Figures 1 to 5 As shown in the figure, in an embodiment provided by the invention, a two-dimensional motion platform is provided, including:

[0049] Base 10;

[0050] The x-direction motion platform 20 is installed on the base 10 through the x-direction guide rail 21 and can move linearly in the x-direction relative to the base 10;

[0051] The y-direction moving platform 30 is installed on the base 10 through the y-direction guide rail 31 and can move linearly in the y-direction relative to the base 10;

[0052] The working motion platform 40 is installed on the x-direction motion platform 20 through the motion platform guide rail 41 and connected with the y-direction motion platform 30 through the decoupling guide rail 32. The working motion platform 40 can make linear movement in the XY plane driven by the x-direction motion platform 20 and the y-direction motion platform 30;

[0053] The x-direction driving linear motor 50 is used to drive the x-direction moving pla...

Embodiment 2

[0075] as Figures 6 to 11 As shown in the figure, in an embodiment provided by the invention, a two-dimensional motion platform is provided, including:

[0076] Base 10;

[0077] The x-direction motion platform 20 is installed on the base 10 through the x-direction guide rail 21 and can move linearly in the x-direction relative to the base 10;

[0078]The y-direction moving platform 30 is installed on the base 10 through the y-direction guide rail 31 and can move linearly in the y-direction relative to the base 10;

[0079] The working motion platform 40 is installed on the x-direction motion platform 20 through the motion platform guide rail 41 and connected with the y-direction motion platform 30 through the decoupling guide rail 32. The working motion platform 40 can move linearly in the XY plane driven by the x-direction motion platform 20 and the y-direction motion platform 30;

[0080] The x-direction driving linear motor 50 is used to drive the x-direction moving platform 2...

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PUM

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Abstract

The invention relates to the technical field of semiconductor packaging and manufacturing, and provides a two-dimensional motion platform which comprises a base, an X-direction motion platform, a Y-direction motion platform, a working motion platform, an X-direction driving linear motor and a Y-direction driving linear motor. The X-direction driving linear motor and the Y-direction driving linear motor can respectively drive the X-direction motion platform and the Y-direction motion platform to do linear motion and finally drive the working motion platform to do two-dimensional linear motion in an XY plane, and a linear motor stator of the two-dimensional linear platform is mounted on a motion platform base through a flexible device; therefore, the impact force of the linear motor stator on the motion platform base is reduced, the vibration of the motion platform is reduced, and the operation stability and positioning precision of the motion platform are improved; the impact of the motor stator on the base of the motion platform can be obviously reduced, the vibration of the motion platform and the base is reduced, the motion platform operates more stably, the stabilization time is obviously shortened when the motion platform stops, the vibration time is shortened, and the positioning precision is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor packaging manufacturing, in particular to a moving platform of wire bonding equipment, in particular to a two-dimensional moving platform. Background technology [0002] Due to the increasing requirements for processing speed and accuracy in machining, especially in the field of semiconductor packaging, high-speed two-dimensional motion platforms are generally driven by high-thrust linear motors and lighter moving parts to achieve high-speed and high acceleration. However, when the speed and acceleration of the moving platform increase to a certain extent, the mechanical vibration of the moving platform begins to become obvious. In particular, the two-dimensional linear motion platform used in the field of semiconductor packaging often needs high acceleration, frequent start stop commutation and short stroke reciprocating motion. At this time, the vibration of the motion platform is significant, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02K41/02F16F15/067F16F15/08H02K11/22H01L21/687
CPCH02K41/02F16F15/067F16F15/08H02K11/22H01L21/68764
Inventor 张振夺陈强刘鑫
Owner SHENZHEN DEVOL ADVANCED AUTOMATION CO LTD
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