The invention relates to the technical field of
semiconductor packaging and manufacturing, and provides a two-dimensional motion platform which comprises a base, an X-direction motion platform, a Y-direction motion platform, a working motion platform, an X-direction driving
linear motor and a Y-direction driving
linear motor. The X-direction driving
linear motor and the Y-direction driving linear motor can respectively drive the X-direction motion platform and the Y-direction motion platform to do
linear motion and finally drive the working motion platform to do two-dimensional
linear motion in an XY plane, and a linear motor
stator of the two-dimensional linear platform is mounted on a motion platform base through a flexible device; therefore, the
impact force of the linear motor
stator on the motion platform base is reduced, the vibration of the motion platform is reduced, and the operation stability and positioning precision of the motion platform are improved; the
impact of the motor
stator on the base of the motion platform can be obviously reduced, the vibration of the motion platform and the base is reduced, the motion platform operates more stably, the stabilization time is obviously shortened when the motion platform stops, the vibration time is shortened, and the positioning precision is improved.