Cooling device applied to sample table

A technology of cooling device and sample stage, applied in the fields of single crystal growth, chemical instruments and methods, laboratory utensils, etc., can solve the problems of increasing operation difficulty and uncertainty, and achieve easy maintenance and replacement, reduce space requirements, save energy effect of space

Active Publication Date: 2022-06-28
中科艾科米(北京)科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the process of rapid cooling of the sample, it is necessary to transfer the sample from one sample stage to another group of sample stages through a structure such as a manipulator, which increases the difficulty and uncertainty of the operation
In addition, due to the need to install two sample stages at the same time, there are greater requirements for the cavity space and installation size

Method used

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  • Cooling device applied to sample table
  • Cooling device applied to sample table
  • Cooling device applied to sample table

Examples

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Embodiment Construction

[0034] The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments, but the protection scope of the present invention is not limited thereby.

[0035] figure 1 The front view structure of the cooling device 10 according to the embodiment of the present invention is schematically shown; figure 2 The top view structure of the cooling device 10 according to the embodiment of the present invention is schematically shown; image 3 The assembly structure of the cooling device 10 and the sample stage 101 according to the embodiment of the present invention is schematically shown.

[0036] like Figure 1 to Figure 3 As shown, the cooling device 10 applied to the sample stage according to the embodiment of the present invention includes a connecting part 1 and a cooling assembly 2, wherein the top of the cooling assembly 2 has a supporting part that can be matched with the bottom of the sample stage 101, and on...

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Abstract

The invention provides a cooling device applied to a sample stage, the cooling device comprises a connecting component and a cooling assembly, the top of the cooling assembly is provided with a supporting part which can be matched with the bottom of the sample stage, one end of the connecting component is connected with the cooling assembly, and the other end of the connecting component is connected with a linear push-pull device. The linear push-pull device is arranged on the molecular beam epitaxy system cavity and can push the connecting part into and pull the connecting part out of the molecular beam epitaxy system cavity. According to the cooling device provided by the invention, under the condition that the sample does not need to be manually clamped and moved, the sample is rapidly cooled, the heating function of the sample table is not influenced, and the space is saved as much as possible.

Description

technical field [0001] The invention relates to the technical field of structural design of a sample stage in a molecular beam epitaxy evaporation system, in particular to a cooling device applied to the sample stage. Background technique [0002] In the molecular beam epitaxy evaporation system, the sample stage is one of the most important parts. In order to obtain a better sample surface and substrate conditions for growth, it is necessary to anneal the sample and other processes. According to the size of the sample, it is mainly divided into two types: [0003] For small size (mainly 20mm and below) samples, the flag-type sample holder is mainly used. Due to its small size, heating (above 1000 degrees Celsius) and cooling (at least liquid nitrogen or Functions such as liquid helium temperature) are organically integrated, so generally small-sized sample stages can have both heating and cooling functions at the same time; [0004] For large-sized samples (mainly wafers ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B23/02B01L7/00
CPCC30B23/02B01L7/00
Inventor 刘欣
Owner 中科艾科米(北京)科技有限公司
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