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Auto-collimation absolute angle measurement method and system based on spectrum discrimination technology

A technology of self-collimation and fiber-optic collimation mirror, which is applied in the direction of measuring devices, diffraction gratings, optical devices, etc., can solve the problems of inability to achieve absolute measurement, inconvenience, alignment errors between laser sources and self-collimation units, and achieve Realize the effect of dynamic high-precision reconstruction

Active Publication Date: 2022-07-05
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Multi-target laser interferometry needs to install multiple target mirrors on the measured object, which increases the complexity of the system
In addition, the traditional optical interference measurement method is also affected by phase ambiguity, and can only achieve incremental measurement, which cannot be interrupted and continued, which is extremely inconvenient for many applications
[0004] In the prior art, the autocollimator will cause alignment errors between the laser source and the autocollimation unit during the assembly process, so it cannot achieve absolute measurement in a complete sense, that is, the measurement of the gap between the normal of the mirror under test and the incident beam. angle, but can only measure a certain range of angle changes, so that the above method has been excluded from the application of measuring the surface direction of spliced ​​lenses, measuring the absolute attitude of moving objects, and reset measurement after system restart in the process of precision manufacturing and processing. Outside

Method used

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  • Auto-collimation absolute angle measurement method and system based on spectrum discrimination technology
  • Auto-collimation absolute angle measurement method and system based on spectrum discrimination technology
  • Auto-collimation absolute angle measurement method and system based on spectrum discrimination technology

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Experimental program
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Effect test

Embodiment 1

[0073] Embodiment 1: Based on the above principles, the self-collimation absolute angle measurement method provided by this embodiment, the implementation process includes:

[0074] S1. The optical frequency comb transmits optical pulses containing multiple longitudinal modes to the fiber circulator;

[0075] S2. The light pulses introduced by the fiber circulator are emitted to the grating through the fiber collimator, and diffracted by the grating to generate a group of first-order diffracted beams with different diffraction angles;

[0076] S3. When the angle between the grating normal and the incident beam changes, the incident beam with a certain spectral width can be re-coupled into the fiber collimator and emitted to the fiber circulator after diffraction by the grating;

[0077] S4. The center frequency of the coupled beam is obtained by analyzing the optical comb spectral components derived from the optical fiber circulator, so as to realize the measurement of the ang...

Embodiment 2

[0078] Example 2: as figure 1 As shown, the self-collimation absolute angle measuring system proposed in this embodiment includes a single optical comb 1 , an optical fiber circulator 2 , an optical fiber collimating mirror 3 and a reflection grating 4 .

[0079] The normal line of the reflective grating 4 forms a certain initial angle with the light exit direction of the fiber collimator 3, that is, the direction of the incident beam. In the process of angle measurement, after the incident beam with a certain spectral width is diffracted by the reflective grating 4, some longitudinal mode components can always be recoupled into the fiber collimator 3 approximately parallel to the incident direction to ensure the effectiveness of the measurement.

[0080] The single optical comb 1 emits optical pulses containing multiple longitudinal modes to the fiber circulator 2;

[0081] The light pulses imported through the fiber circulator 2 are emitted to the reflection grating 4 throu...

Embodiment 3

[0084] Embodiment 3: This embodiment differs from Embodiment 2 in that, as image 3 As shown, this embodiment adopts a double optical comb, including a first optical frequency comb 5 and a second optical frequency comb 6. The first optical frequency comb 5 and the second optical frequency comb 6 are combined by the optical fiber coupler 7 and sent to the optical fiber The circulator 2 is derived, and is collimated and incident on the reflection grating 4 by the optical fiber collimator 3, and the optical signal derived from the optical fiber circulator 2 is sent to the signal processing device 8 for analysis and calculation of the optical comb spectral components. The processing device 8 includes a detector 81 , a filter 82 and a processor 83 , and the specific process of discriminating and calculating the optical comb spectral components will not be described in detail.

[0085] Preferably, the dual optical comb system in this embodiment can use two optical frequency combs wi...

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Abstract

The invention relates to an auto-collimation absolute angle measurement method and system based on a spectrum discrimination technology. The method comprises the following steps that: an optical frequency comb transmits an optical pulse containing a plurality of longitudinal modes to an optical fiber circulator; light pulses guided in by the optical fiber circulator are emitted to the grating through the optical fiber collimating mirror, and a group of first-order diffraction beams with different diffraction angles are generated after the light pulses are diffracted by the grating; when the included angle between the normal of the grating and the incident beam is changed, after the incident beam with a certain spectral width is diffracted by the grating, part of longitudinal mode components can be recoupled to enter the optical fiber collimating mirror and emitted to the optical fiber circulator; and the included angle between the normal of the grating and the incident beam is measured by discriminating the spectral component of the optical comb led out by the optical fiber circulator. According to the invention, the control of the diffraction beam spectrum by the grating and the frequency domain characteristic of the optical frequency comb are organically combined, the angle change is converted into the spectral component change of the optical frequency comb, and the absolute measurement of the included angle between the incident beam and the normal of the grating is completed by discriminating the amplitude-frequency characteristic of the spectrum.

Description

technical field [0001] The invention relates to a self-collimation absolute angle measurement method and system based on spectrum discrimination technology, and relates to the field of optical precision measurement. Background technique [0002] Angle measurement has a wide range of applications in precision manufacturing and processing, satellite antenna measurement, and assembly of synthetic aperture optical systems. To meet the demand for high-performance angle measurement, optical non-contact angle measurement methods such as self-collimation angle measurement, differential wavefront sensing, and multi-target laser interferometry have been developed. [0003] Because of its high accuracy and measurement resolution, the self-collimation goniometer method is usually used as a commercial standard method to measure the accuracy of other goniometric methods. However, due to the limitation of the objective lens aperture, its angle measurement range can only reach hundreds of ...

Claims

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Application Information

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IPC IPC(8): G01B11/26G02B5/18
CPCG01B11/26G02B5/18Y02A90/10
Inventor 吴冠豪周思宇
Owner TSINGHUA UNIV