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Acoustic delay line with movable partition plates

A technology of acoustic delay line and baffle, which is applied in irradiation devices, electrical components, nuclear engineering, etc., and can solve problems such as difficult gas collection and large through-hole size

Inactive Publication Date: 2004-04-21
SUMITOMO HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the exposure area becomes large, the size of the through hole formed on the spacer 64 of the acoustic delay line also becomes large.
Therefore it is difficult to collect gas for a long time

Method used

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  • Acoustic delay line with movable partition plates
  • Acoustic delay line with movable partition plates
  • Acoustic delay line with movable partition plates

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] figure 1 is a schematic cross-sectional view of an acoustic delay line of a beamline according to an embodiment of the invention. For example, this acoustic delay line is used instead of Figure 9 Vacuum conduit 57 of the x-ray exposure system is shown. exist Figure 9 Downstream of the mirror box 54 shown, a vacuum conduit 57 is connected downstream of the large diameter external tube unit 1 connecting the beamline. The inner pipe 2 is installed inside the large-diameter outer pipe unit 1 . The inner tube 2 serves as an envelope for the optical path of the radiated light. The radiation light output rack 3 is coupled to the tip of the inner tube 2 on its downstream side. Both the flange plate 5 and the radiation light output frame 3 installed at the downstream end of the large-diameter outer tube unit 1 are sealed with a vacuum bellows 4 . drive 6 1 and 6 2 Both are mounted on the lower wall of the large diameter outer pipe unit 1 at the opposite end. drive 6 1...

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PUM

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Abstract

X-rays transmit through a vacuum duct along an axial direction of the vacuum duct. A plurality of first partition plates are disposed in the vacuum duct. Each of the first partition plates is formed with a first through hole at a central area thereof. The first partition plates divide the inner space of the vacuum duct in the axial direction and define a plurality of partitioned spaces. A plurality of second partition plates are provided each corresponding to each of the first partition plates. The second partition plate is disposed at a certain gap relative to a corresponding one of the first partition plates, each of the second partition plates being formed with a second through hole at a central area thereof, the X-rays transmitting through the vacuum duct passing through the second through hole. A support member connects the second partition plates together and fixes a relative position of the second partition plates. A support member driving unit supports the support member in the inner space of the vacuum duct and drives the support member to move the second partition plates in accordance with a swing of a central axis of a flux of the X-rays transmitting through the inner space of the vacuum-duct. A film hermetically seals an output end of the vacuum duct and transmits the X-rays therethrough.

Description

technical field [0001] This application is based on Japanese Patent Application No. Hei 9-100844 filed April 4, 1997, the entire contents of which are incorporated herein by reference. Background technique [0002] The present invention relates to an acoustic delay line, and more particularly to an acoustic delay line provided along a beamline. [0003] Figure 9 Showing a schematic diagram of a general x-ray exposure system using synchrotron radiation, the schematic diagram shows a synchrotron 50 moving an electron beam circularly on a horizontal plane in an ultrahigh vacuum. A synchrotron produces radiation tangential to a circular orbit. Radiation light 52 from a synchrotron 50 is introduced into a vacuum conduit 53 . Installed around this vacuum conduit 53 are a vacuum shutter valve 65, a high-speed vacuum shutter valve 66, and, if necessary, an unshown blocking shutter for blocking radiated light, an unshown vacuum pump, and the like. A mirror box 54 is connected dow...

Claims

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Application Information

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IPC IPC(8): G21K5/02H05H7/00H05H7/14H05H13/04
CPCH05H7/14H05H7/00
Inventor 丰田英二郎
Owner SUMITOMO HEAVY IND LTD