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Germanium evaporation material and preparation method and application thereof

A technology of germanium ingots and grinding materials, applied in the fields of germanium evaporation materials, germanium evaporation materials and their preparation, can solve the problems of unsuitable preparation of germanium evaporation materials, achieve the effects of efficient and easy preparation methods, improve uniformity, and meet high purity

Pending Publication Date: 2022-07-22
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the method provided by the above-mentioned invention is only suitable for the crushing of quartz materials, and is not suitable for the preparation of germanium evaporation materials.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0062] The present embodiment provides a germanium evaporation material and a preparation method thereof, and the preparation method includes the following steps:

[0063] (1) Use a jaw crusher to crush germanium ingots with a purity of ≥5N;

[0064] (2) adopting the screen mesh with an average mesh diameter of 8 mm to carry out coarse screening on the germanium particles obtained in step (1), the obtained over-sieve material is returned to step (1) for crushing, and the under-screen material is subjected to subsequent fine screening;

[0065] (3) adopting the mesh screen with an average diameter of 4mm to carry out fine sieving to the under-sieve obtained in step (2), the obtained over-sieve is subjected to subsequent grinding, and the under-sieve is directly cleaned;

[0066] (4) mixing germanium particles, grinding liquid and grinding material in the magnetic grinding machine to carry out grinding with a frequency of 40 Hz and a time of 8 min; the grinding material is a spe...

Embodiment 2

[0072] The present embodiment provides a germanium evaporation material and a preparation method thereof, and the preparation method includes the following steps:

[0073] (1) Use a jaw crusher to crush germanium ingots with a purity of ≥5N;

[0074] (2) adopting the screen mesh with an average mesh diameter of 6mm to carry out coarse screening on the germanium particles obtained in step (1), the obtained over-sieve material is returned to step (1) for crushing, and the under-screen material is subjected to subsequent fine screening;

[0075] (3) adopting the mesh screen with an average diameter of 3 mm to carry out fine sieving to the under-sieve obtained in step (2), the obtained over-sieve is subjected to subsequent grinding, and the under-sieve is directly cleaned;

[0076] (4) mixing germanium particles, grinding liquid and grinding material in the magnetic grinding machine to carry out grinding with a frequency of 50 Hz and a time of 5 min; the grinding material is a spe...

Embodiment 3

[0082] The present embodiment provides a germanium evaporation material and a preparation method thereof, and the preparation method includes the following steps:

[0083] (1) Use a jaw crusher to crush germanium ingots with a purity of ≥5N;

[0084] (2) adopting the screen mesh with an average mesh diameter of 10mm to carry out coarse screening on the germanium particles obtained in step (1), the obtained over-sieve material is returned to step (1) for crushing, and the under-screen material is subjected to subsequent fine screening;

[0085] (3) adopting the screen mesh with an average mesh diameter of 5mm to carry out fine sieving to the under-sieve obtained in step (2), the obtained over-sieve is subjected to subsequent grinding, and the under-sieve is directly cleaned;

[0086] (4) mixing germanium particles, grinding liquid and grinding material in the magnetic grinding machine to carry out grinding with a frequency of 35 Hz and a time of 10 min; the grinding material is...

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Abstract

The invention provides a germanium evaporation material and a preparation method and application thereof. The preparation method comprises the steps of crushing, coarse screening, fine screening, grinding and cleaning in sequence. Oversize products obtained through coarse screening are returned to be crushed, and undersize products are subjected to fine screening; oversize products obtained through fine screening are ground, and undersize products are directly cleaned; the average particle size of the germanium evaporation material obtained through the preparation method is smaller than or equal to 5 mm. The preparation method provided by the invention is efficient and easy to industrially produce the germanium particle evaporation material for the semiconductor, and meets the requirements of the semiconductor industry on high-purity and high-quality germanium evaporation materials.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and relates to a germanium evaporation material, in particular to a germanium evaporation material and a preparation method and application thereof. Background technique [0002] As an infrared optical material, germanium has the advantages of high infrared refractive index, wide infrared transmission band range, small absorption coefficient, low dispersion rate, and easy processing. It is especially suitable for thermal imagers and infrared radars in military and major civil applications. Preparation materials for windows, lenses, prisms and filters of other infrared optical devices. [0003] With the rapid development of the semiconductor industry, the demand for germanium evaporating materials for evaporation coating is increasing, especially the supply of high-purity and high-quality germanium particles is in short supply. preparation method. [0004] CN 112961652A discloses a produc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B02C21/00B02C23/12B02C23/14C22B41/00
CPCB02C21/00B02C23/12B02C23/14C22B41/00
Inventor 姚力军潘杰王学泽边逸军慕二龙
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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