Efficient silicon wafer spin coater based on Bernoulli principle
A Bernoulli and homogenizer technology, used in mixers with rotary stirring devices, post-processing, mixers, etc., can solve problems such as low work efficiency, inability to adjust the position of silicon wafer jacking, and improve processing efficiency. Effect
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[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0029] Specific examples are given below.
[0030] see Figure 1 to Figure 4 , a high-efficiency silicon wafer homogenizer based on the Bernoulli principle, including a gantry 1, a conveyor belt 2 and a feeding mechanism 3, and a conveyor belt 2, a feeding mechanism 3 and a storage hopper 4 are installed on the top of the gantry 1. A top cover 5 is installed in the middle of the belt 2, a glue tank 6 is installed on the top of the ...
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