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Efficient silicon wafer spin coater based on Bernoulli principle

A Bernoulli and homogenizer technology, used in mixers with rotary stirring devices, post-processing, mixers, etc., can solve problems such as low work efficiency, inability to adjust the position of silicon wafer jacking, and improve processing efficiency. Effect

Pending Publication Date: 2022-08-09
江苏芯悦电子科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The problem solved by the present invention is to provide a high-efficiency silicon wafer homogenizer based on Bernoulli's principle, which solves the problem that the existing silicon wafer homogenizer needs to be manually loaded during actual use, resulting in low work efficiency; at the same time During the glue dispensing operation, it is impossible to adjust the lifting position of the silicon wafer to realize the automatic filling of glue and the automatic stirring of glue in the glue tank. It is necessary to be specially equipped with a liquid pump and a technical problem to realize the motor.

Method used

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  • Efficient silicon wafer spin coater based on Bernoulli principle
  • Efficient silicon wafer spin coater based on Bernoulli principle
  • Efficient silicon wafer spin coater based on Bernoulli principle

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Embodiment Construction

[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] Specific examples are given below.

[0030] see Figure 1 to Figure 4 , a high-efficiency silicon wafer homogenizer based on the Bernoulli principle, including a gantry 1, a conveyor belt 2 and a feeding mechanism 3, and a conveyor belt 2, a feeding mechanism 3 and a storage hopper 4 are installed on the top of the gantry 1. A top cover 5 is installed in the middle of the belt 2, a glue tank 6 is installed on the top of the ...

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Abstract

The efficient silicon wafer spin coater based on the Bernoulli principle comprises a rack, a conveying belt and a feeding mechanism, the conveying belt, the feeding mechanism and a storage hopper are installed at the top of the rack, a top cover is installed in the middle of the conveying belt, a glue tank is installed at the top of the top cover, a mounting plate is installed in the top cover, and a glue tank is installed in the mounting plate. A first one-way valve is mounted on the bottom side of the glue tank, a spraying seat is mounted on the bottom side of the mounting plate, the first one-way valve is connected with the top end of a connecting pipe in a communicating manner, and the bottom end of the connecting pipe is connected with the spraying seat in a communicating manner; the motor works to drive the threaded rod to rotate and drive the sliding base in threaded connection to move, the first air pressure rod drives the lifting base and the vacuum suction cup to ascend and descend, silicon wafers are adsorbed and transferred through the vacuum suction cup, automatic feeding of the silicon wafers is achieved, and the machining efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of silicon wafer processing, in particular to a high-efficiency silicon wafer gluing machine based on the Bernoulli principle. Background technique [0002] The glue coating treatment of silicon wafer is to coat the surface of silicon wafer with a thin and uniform glue. [0003] When the existing silicon wafer gluer is actually used, manual feeding operation is required, resulting in low work efficiency; at the same time, during the glue dispensing operation, it is impossible to adjust the lifting position of the silicon wafer to realize automatic filling of glue and The automatic mixing of glue in the glue tank needs to be specially equipped with a liquid pump and a motor. SUMMARY OF THE INVENTION [0004] The problem solved by the invention is to provide a high-efficiency silicon wafer gluer based on the Bernoulli principle, which solves the problem that the existing silicon wafer gluer needs manual fee...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05C5/02B05C13/02B05C11/10C30B33/00B01F27/90
CPCB05C5/0208B05C13/02B05C11/1002C30B33/00Y02P70/50
Inventor 秦有贵辛奇胡凯徐峰杨军闫乐成秦宝宏
Owner 江苏芯悦电子科技有限公司